IP Library Granted Patent US 10,147,865
Granted Patent B1
US 10,147,865 · App. 13/999,574 · Granted Dec 4, 2018

Epitaxial superconducting devices and method of forming same

Inventor: Charles George Tahan (Silver Spring, MD)
H01L39/025H01L39/12H01L39/223H01L39/228H01L39/2493
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Quick Facts
Patent No.
US 10,147,865
App. No.
13/999,574
Granted
Dec 4, 2018
Kind
B1
Abstract

Superconducting regions formed with a crystal provide highly doped regions of acceptor atoms. These superconducting regions are used to provide superconducting devices wherein non-epitaxial interfaces have been eliminated. A method is provided to highly doped regions of a crystal to form the superconducting regions and devices. By forming the superconducting regions within the crystal non-epitaxial interfaces are eliminated.

Claims (89)

1. A superconducting device comprising:

a crystal;

a portion of said crystal highly-doped with acceptor atoms, providing a superconducting region, the superconducting region including a plurality of monolayers, wherein fewer than all of the monolayers are doped;

wherein the superconducting region is surrounded by the crystal; and

wherein an interface between said crystal and said superconducting region is epitaxial.

2. The device of claim 1 , wherein said crystal is silicon.

3. The device of claim 1 , wherein said crystal is germanium.

4. The device of claim 1 , wherein said crystal is diamond.

5. The device of claim 1 , wherein the number of monolayers provided by said superconducting region is determined by N total =(N 1 −1)k+1, where k identifies the frequency of doping of the monolayers, N 1 identifies the number of monolayers which have been doped, and is provided by

N

1

=

a

2

n

C

(

4

-

d

B

-

ak

)

(

C

2

+

T

C

2

)

a

3

k

n

C

(

C

2

+

T

C

2

)

-

8

C

2

r

D

,

and a is the lattice constant of the crystal, T c is the critical superconducting temperature sought, r D is the doping rate per layer, d B is the effective electron or hole density region in the highly-doped region, n c is the minimum impurity density required for superconductivity, and C is a material constant for said crystal.

6. The device of claim 1 :

wherein the device includes first and second superconducting regions; and

wherein said first and second superconducting regions are spaced to form a capacitance.

7. The device of claim 1 :

wherein the device includes first and second superconducting regions; and

a junction positioned between said first and second superconducting regions to provide a Josephson junction.

8. The device of claim 7 , wherein said junction is provided by a portion of said crystal forming an insulating region, said superconducting regions are separated by a distance such that quantum tunneling can occur between said two superconducting regions through said insulating region.

9. The device of claim 7 , wherein said junction is provided by a weak link junction.

10. The device of claim 1 , further comprising:

a top gate; and

wherein said top gate provides modulation of a density of carriers in said superconducting region.

11. The device of claim 8 , further comprising:

a top gate; and

wherein said top gate provides modulation of a the carriers in said junction.

12. The device of claim 1 :

wherein the device includes first and second superconducting regions and a junction and said device provides a qubit.

13. The device of claim 1 :

wherein the device includes first and second superconductor regions;

a junction positioned between said first and second superconducting regions; and

wherein said first and second superconducting regions form a loop and said device functions as a SQUID.

14. The device of claim 1 :

wherein said superconducting region is in communication with a superconducting resonator circuit to provide a particle detector.

15. The device of claim 14 , further comprising:

a top gate; and

wherein said top gate provides modulation of a density of carriers in said superconducting region, thereby providing an adjustable superconducting energy gap of the particle detector.

16. The device of claim 1 , further comprising an abrupt transition region, wherein said transition region is approximately one monolayer thick.

Continuity (1)
Provisional Application 61854263 · Aug 12, 2013
Cited By (2)
US 12,408,562 US 12,718,975