Semiconductor device with gate electrode embedded in substrate
A semiconductor device includes a semiconductor substrate, a gate dielectric layer, a gate electrode and source and drain regions. The gate dielectric layer extends into a first trench in the semiconductor substrate. The gate electrode is over the gate dielectric layer and is at least partially embedded in the first trench in the semiconductor substrate. The source and drain regions are in the semiconductor substrate and proximate the first trench in the semiconductor substrate.
1. A semiconductor device, comprising:
a semiconductor substrate;
a gate dielectric layer extending into a first trench in the semiconductor substrate;
a gate electrode over the gate dielectric layer and at least partially embedded in the first trench in the semiconductor substrate; and
source and drain regions in the semiconductor substrate and proximate the first trench in the semiconductor substrate,
wherein the gate dielectric layer comprises a cap portion capping the source and drain regions, and the cap portion has a top surface substantially level with or higher than a top surface of the gate electrode.
2. The semiconductor device of claim 1 , wherein the gate electrode tapers in a direction toward the semiconductor substrate.
3. The semiconductor device of claim 1 , wherein the gate electrode and the first trench taper in the same direction.
4. The semiconductor device of claim 1 , wherein the gate dielectric layer defines a second trench over the first trench, and the gate electrode is embedded in the second trench defined by the gate dielectric layer.
5. The semiconductor device of claim 4 , wherein the second trench defined by the gate dielectric layer tapers in a direction toward the semiconductor substrate.
6. The semiconductor device of claim 1 , wherein the gate dielectric layer comprises inner and outer sidewalls extending into the first trench, the inner sidewall abuts the gate electrode, and wherein the outer sidewall abuts the source and drain regions.
7. The semiconductor device of claim 1 , wherein the gate electrode is partially raised above the semiconductor substrate.
8. The semiconductor device of claim 1 , wherein the cap portion is outside the first trench.
9. The semiconductor device of claim 1 , wherein the semiconductor substrate comprises a top surface, the first trench comprises a trench sidewall coinciding with the top surface, and wherein the gate dielectric layer conformally covers the top surface and the trench sidewall.
10. The semiconductor device of claim 1 , wherein the semiconductor substrate comprises a top surface, the first trench comprises a trench sidewall coinciding with the top surface, and wherein one of the source and drain regions is present at a corner between the top surface and the trench sidewall.
11. The semiconductor device of claim 1 , further comprising:
a memory device comprising a floating gate over the semiconductor substrate, wherein the floating gate and the gate electrode have substantially the same material.
12. The semiconductor device of claim 1 , further comprising:
a memory device comprising a floating gate over the semiconductor substrate, wherein the floating gate has a top surface higher than a top surface of the gate electrode.
13. The semiconductor device of claim 1 , further comprising:
a shallow trench isolation (STI) in the semiconductor substrate, wherein the shallow trench isolation has a bottom surface substantially level with a bottom surface with the gate dielectric layer.
14. A semiconductor device, comprising:
a semiconductor substrate;
a shallow trench isolation (STI) in the semiconductor substrate, the STI having a bottom surface substantially level with a bottom surface of a trench in the semiconductor substrate;
a dielectric trench liner lining sidewalls and the bottom surface of the trench in the semiconductor substrate;
a gate electrode over the dielectric trench liner and at least partially embedded in the trench in the semiconductor substrate; and
source and drain regions respectively adjacent to opposite sides of the trench.
15. The semiconductor device of claim 14 , further comprising:
a memory device comprising a floating gate over the semiconductor substrate, wherein the floating gate has a top surface higher than that of the gate electrode.
16. The semiconductor device of claim 14 , further comprising:
a memory device comprising a floating gate over the semiconductor substrate, wherein the floating gate has a bottom surface higher than that of the gate electrode.
17. The semiconductor device of claim 14 , further comprising:
a memory device comprising a floating gate over the semiconductor substrate, wherein the gate electrode is made of a material of the floating gate.
18. A semiconductor device, comprising:
a semiconductor substrate;
a high-k dielectric layer on the semiconductor substrate;
a metal gate on the high-k dielectric layer;
a transistor comprising source/drain regions in the semiconductor substrate and a polysilicon gate embedded in the semiconductor substrate and in between the source/drain regions, wherein the polysilicon gate has a bottom surface lower than a bottom surface of the metal gate; and
a flash memory cell on the semiconductor substrate and comprising a floating gate, wherein the floating gate has a bottom surface higher than the bottom surface of the polysilicon gate and lower than the bottom surface of the bottom surface of the metal gate.
19. The semiconductor device of claim 18 , wherein the polysilicon gate and the metal gate have different cross-sectional profiles.
20. The semiconductor device of claim 18 , wherein the polysilicon gate has a top surface lower than a top surface of the floating gate of the flash memory cell.