IP Library Granted Patent US 10,170,547
Granted Patent B2
US 10,170,547 · App. 15/507,530 · Granted Jan 1, 2019

Nanodevice

Inventors: Yutaka Majima (Yokohama, JP); Toshiharu Teranishi (Uji, JP); Shinya Kano (Yokohama, JP); Eiki Aoyama (Yokohama, JP)
Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
H01L29/0665B82Y30/00G06N99/002H01L27/115H01L28/00H01L29/786H01L29/788H01L29/7831H01L29/792H01L49/006B82Y15/00
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Quick Facts
Patent No.
US 10,170,547
App. No.
15/507,530
Granted
Jan 1, 2019
Kind
B2
Abstract

A nanodevice capable of controlling the state of electric charge of a metal nanoparticle is provided. The device includes: nanogap electrodes 5 including one electrode 5 A and the other electrode 5 B disposed so as to have a nanosize gap in between; a nanoparticle 7 placed between the nanogap electrodes 5 ; and a plurality of gate electrodes 9 . At least one of the plurality of gate electrodes 9 is used as a floating gate electrode to control the state of electric charge of the nanoparticle 7 , which achieves a multivalued memory and rewritable logical operation.

Claims (51)

1. A nanodevice comprising:

nanogap electrodes comprising a first electrode and a second electrode so as to have a nanosized gap in between;

a nanoparticle disposed between the nanogap electrodes;

one or more gate electrodes, each of the one or more gate electrodes connected to a wire so as to apply an input voltage;

a floating gate electrode;

a control gate electrode to control a state of electric charge of the floating gate electrode;

a first insulating layer on which the nanogap electrodes and the floating gate electrode are disposed; and

a second insulating layer disposed on the first insulating layer, the nanogap electrodes, the floating gate electrode, and the nanoparticle,

wherein the control gate electrode is disposed on the first insulating layer, and

the control gate electrode is disposed on an opposite side to the nanoparticle with the floating gate electrode interposed therebetween, or

wherein the control gate electrode is disposed on the second insulating layer and above the floating gate electrode, and

wherein the one or more gate electrodes do not include the floating gate electrode and the control gate electrode.

2. The nanodevice as set forth in claim 1 ,

wherein the one or more gate electrodes comprise any one of a side gate electrode, a top gate electrode, and a bottom gate electrode, and a combination thereof,

wherein the side gate electrode is disposed on the first insulating layer, the side gate electrode is disposed on an opposite side of the floating gate electrode with the nanoparticle interposed therebetween,

the top gate electrode is disposed on the second insulating layer and above the nanoparticle, and

the bottom gate electrode is disposed under the first insulating layer and below the nanoparticle.

3. A nanodevice comprising:

nanogap electrodes comprising a first electrode and a second electrode so as to have a nanosized gap in between;

a nanoparticle disposed between the nanogap electrodes;

one or more gate electrodes, each of the one or more gate electrodes connected to a wire so as to apply an input voltage;

a floating gate electrode;

a control gate electrode to control a state of electric charge of the floating gate electrode;

a first insulating layer on which the nanogap electrodes are disposed; and

a second insulating layer disposed on the first insulating layer, the nanogap electrodes, and the nanoparticle,

wherein the floating gate electrode is disposed on the second insulting layer and above the nanoparticle,

the nanodevice comprises a third insulating layer on which the second insulating layer and the floating gate electrode are disposed,

the control gate electrode is disposed on the third insulating layer, and

the control gate electrode is disposed above the floating gate electrode, and

wherein the one or more gate electrodes do not include the floating gate electrode and the control gate electrode.

4. The nanodevice as set forth in claim 3 ,

wherein the one or more gate electrodes comprise any one of a side gate electrode, and a bottom gate electrode, and a combination thereof,

the side gate electrode is disposed on the first insulating layer and arranged in a direction crossing an arrangement direction of the nanogap electrodes,

an edge of the side gate electrode faces the nanoparticle, and

the bottom gate electrode is disposed under the first insulating layer and below the nanoparticle.

5. A nanodevice comprising:

nanogap electrodes comprising a first electrode and a second electrode so as to have a nanosized gap in between;

a nanoparticle disposed between the nanogap electrodes;

one or more gate electrodes, each of the one or more gate electrodes connected to a wire so as to apply an input voltage;

a floating gate electrode;

a control gate electrode to control a state of electric charge of the floating gate electrode;

a first insulating layer on which the nanogap electrodes are disposed; and

a second insulating layer disposed on the first insulating layer, the nanogap electrodes, and the nanoparticle,

wherein the floating gate electrode is disposed on the second insulting layer and above the nanoparticle, and

the control gate electrode is disposed on the second insulating layer, and arranged beside a floating gate electrode, and

wherein the one or more gate electrodes do not include the floating gate electrode and the control gate electrode.

6. The nanodevice as set forth in claim 5 ,

wherein the one or more gate electrodes comprise any one of one or two side gate electrodes, and a bottom gate electrode, and a combination thereof,

any one of the one or two side gate electrodes is disposed on the first insulating layer and arranged in a direction crossing an arrangement direction of the nanogap electrodes,

an edge of any one of the one or two side gate electrodes faces the nanoparticle, and

the bottom gate electrode is disposed under the first insulating layer and below the nanoparticle.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 28, 2017
From: MAJIMA, YUTAKA; TERANISHI, TOSHIHARU; KANO, SHINYA; AOYAMA, EIKI
To: JAPAN SCIENCE AND TECHNOLOGY AGENCY
Reel/Frame 041402/0174 →
Priority Claims (1)
JP 2014-176634 · Aug 29, 2014 · national
Continuity (1)
Related Publication 20170288017A1 · Oct 5, 2017