Optical module, optical observation device, and light exposure device
An optical module ( 1 A) includes a polarization beam splitter ( 10 ) that receives input light (L 1 ) including a p-polarization component using a light splitting surface ( 11 ), a first polarization element ( 20 ) that rotates a polarization plane of the input light (L 1 ) transmitted through the light splitting surface ( 11 ), a first reflective SLM ( 30 ) that modulates the input light (L 1 ) to generate first modulation light (L 2 ), a second polarization element ( 40 ) that rotates a polarization plane of the first modulation light (L 2 ) passing through the first polarization element ( 20 ) again and reflected by the light splitting surface ( 11 ), and a second reflective SLM ( 50 ) that modulates the first modulation light (L 2 ) to generate second modulation light (L 3 ). The second modulation light (L 3 ) passes through the second polarization element ( 40 ) again, is transmitted through the light splitting surface ( 11 ), and then is output.
1. An optical module, comprising:
a polarization beam splitter including a light splitting surface configured to reflect an s-polarization component transmit a p-polarization component, and input input light including the p-polarization component;
a first polarization element having nonreciprocal optical activity, and configured to rotate a polarization plane of the input light transmitted through the light splitting surface;
a first reflective spatial light modulator configured to modulate the input light passing through the first polarization element to generate first modulation light, and reflect the first modulation light to the first polarization element;
a second polarization element having nonreciprocal optical activity, and configured to rotate a polarization plane of the first modulation light that passes through the first polarization element again and is reflected by the light splitting surface; and
a second reflective spatial light modulator configured to modulate the first modulation light that passes through the second polarization element to generate second modulation light, and reflect the second modulation light to the second polarization element,
wherein the second modulation light passes through the second polarization element again, is transmitted through the light splitting surface, and then is output.
2. The optical module according to claim 1 ,
wherein the polarization beam splitter includes
a light input surface configured to input the input light;
a light output surface configured to output the second modulation light;
a first surface optically coupled to the first polarization element; and
a second surface optically coupled to the second polarization element.
3. The optical module according to claim 2 ,
wherein the light input surface and the first surface are arranged side by side in a first direction, and
the light output surface and the second surface are arranged side by side in a second direction intersecting with the first direction.
4. The optical module according to claim 2 , further comprising:
a third polarization element optically coupled to the light input surface,
wherein the third polarization element rotates the polarization plane of the input light so that he input light includes the p-polarization component.
5. An optical module, comprising:
a polarization beam splitter including a light splitting surface configured to reflect an s-polarization component and transmit a p-polarization component, and input input light including the s-polarization component using the light splitting surface;
a first polarization element having nonreciprocal optical activity, and configured to rotate a polarization plane of the input light reflected by the light splitting surface;
a first reflective spatial light modulator configured to modulate the input light passing through the first polarization element to generate first modulation light, and reflect the first modulation light to the first polarization element;
a second polarization element having nonreciprocal optical activity, and configured to rotate a polarization plane of the first modulation light that passes through the first polarization element again and is transmitted through the light splitting surface; and
a second reflective spatial light modulator configured to modulate the first modulation light that passes through the second polarization element to generate second modulation light, and reflect the second modulation light to the second polarization element,
wherein the second modulation light passes through the second polarization element again, is reflected by the light splitting surface, and then is output.
6. The optical module according to claim 5 ,
wherein the polarization beam splitter includes
a light input surface configured to input the input light;
a light output surface configured to output the second modulation light;
a first surface optically coupled to the first polarization element; and
a second surface optically coupled to the second polarization element.
7. The optical module according to claim 5 , further comprising:
a ½-wavelength plate arranged either between the polarization beam splitter and the first reflective spatial light modulator or between the polarization beam splitter and the second reflective spatial light modulator.
8. An optical observation apparatus, comprising:
the optical module according to claim 5 ;
a mounting table configured to support an observation target;
a first light-guiding optical system configured to guide light from the observation target to the polarization beam splitter as the input light;
a second light-guiding optical system configured to guide the second modulation light output from the polarization beam splitter; and
a light detector configured to detect the second modulation light guided by the second light-guiding optical system.
9. A light irradiation apparatus, comprising:
the optical module according to claim 5 ;
a mounting table configured to support an irradiation target;
a light source configured to output the input light that is input to the polarization beam splitter; and
a light-guiding optical system configured to guide the second modulation light output from the polarization beam splitter to the irradiation target.
10. The optical module according to claim 6 ,
wherein the light input surface and the light output surface are arranged side by side in a first direction, and
the first surface and the second surface are arranged side by side in a second direction intersecting with the first direction.
11. The optical module according to claim 6 , further comprising:
a third polarization element optically coupled to the light input surface,
wherein the third polarization element rotates the polarization plane of the input light so that the input light includes the s-polarization component.
12. The optical module according to claim 1 , further comprising:
a ½-wavelength plate arranged either between the polarization beam splitter and the first reflective spatial light modulator or between the polarization beam splitter and the second reflective spatial light modulator.
13. An optical observation apparatus, comprising:
the optical module according to claim 1 ;
a mounting table configured to support an observation target;
a first light-guiding optical system configured to guide light from the observation target to the polarization beam splitter as the input light;
a second light-guiding optical system configure to guide the second modulation light output from the polarization beam splitter; and
a light detector configured to detect the second modulation light guided by the second light-guiding optical system.
14. A light irradiation apparatus, comprising:
the optical module according to claim 1 ;
a mounting table configured to support an irradiation target;
a light source configured to output the input light that is input to the polarization beam splitter; and
a light-guiding optical system configured to guide the second modulation light output from the polarization beam splitter to the irradiation target.