IP Library › Granted Patent US 1,026,054
Granted Patent S1
US 1,026,054 · App. 29/835,991 · Granted May 7, 2024

Collimator for a physical vapor deposition (PVD) chamber

Inventors: Martin Lee Riker (Round Rock, TX); Keith A. Miller (Mountain View, CA); Luke Vianney Varkey (Milpitas, CA); Xiangjin Xie (Fremont, CA); Kishor Kumar Kalathiparambil (Santa Clara, CA)
Assignee: APPLIED MATERIALS, INC.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 1,026,054
App. No.
29/835,991
Granted
May 7, 2024
Kind
S1
Claims (1)

We claim the ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 3, 2022
From: RIKER, MARTIN LEE; MILLER, KEITH A.; VARKEY, LUKE VIANNEY; XIE, XIANGJIN; KALATHIPARAMBIL, KISHOR KUMAR
To: APPLIED MATERIALS, INC.
Reel/Frame 059794/0634 →