Semiconductor device and method for manufacturing the same
A semiconductor device including a substrate, a first doped region, a second doped region, a gate, and a gate dielectric layer is provided. The substrate has a first conductive type. The first doped region is formed in the substrate and has a second conductive type. The second doped region is formed in the substrate and has the second conductive type. The gate is formed on the substrate and is disposed between the first and second doped regions. The gate dielectric layer is formed on the substrate and is disposed between the gate and the substrate. The gate dielectric layer includes a first region and a second region. The depth of the first region is different from the depth of the second region.
1. A semiconductor device, comprising:
a substrate having a first conductive type;
a well formed in the substrate and having the first conductive type, wherein a dopant concentration of the well is lower than a dopant concentration of the substrate;
a first doped region formed in the well and having a second conductive type;
a second doped region formed in the well and having the second conductive type;
a gate formed on the well and disposed between the first and second doped regions;
a gate dielectric layer formed on the well and disposed between the gate and the substrate, wherein the gate dielectric layer comprises:
a first region;
a second region, wherein the depth of the first region is different from the depth of the second region; and
a third region, wherein the depth of the third region is the same as the depth of the first region, and the second region is disposed between the first and third regions;
a first insulating sidewall layer forming over a first sidewall of the gate and a first sidewall of the gate dielectric layer;
a second insulating sidewall layer forming over a second sidewall of the gate and a second sidewall of the gate dielectric layer;
a first lightly doped drain forming in the well and having the second conductive type, wherein first lightly doped drain directly contacts the first doped region and the first insulating sidewall layer; and
a second lightly doped drain forming in the well and having the second conductive type, wherein second lightly doped drain directly contacts the second doped region and the second insulating sidewall layer,
wherein the second doped region does not contact the gate dielectric layer, and
wherein the first and second doped regions directly contact the well.
2. The semiconductor device as claimed in claim 1 , wherein the first doped region, the second doped region, and the gate constitute a transistor.
3. The semiconductor device as claimed in claim 1 , wherein the first conductive type is P-type, and the second conductive type is N-type.
4. The semiconductor device as claimed in claim 1 , wherein the first conductive type is N-type, and the second conductive type is P-type.
5. A method for manufacturing a semiconductor device, comprising:
providing a substrate having a first conductive type;
forming a well in the substrate, wherein the well has the first conductive type, and a dopant concentration of the well is lower than a dopant concentration of the substrate;
forming a first doped region in the well, wherein the first doped region has a second conductive type;
forming a second doped region in the well, wherein the second doped region has the second conductive type;
forming a gate on the well, wherein the gate is disposed between the first and second doped regions;
forming a gate dielectric layer on the well, wherein the gate dielectric layer is disposed between the gate and the substrate and comprises a first region, a second region, and a third region, wherein the second region is disposed between the first and third regions, a depth of the first region is different from a depth of the second region and a depth of the third region is the same as the depth of the first region;
forming a first insulating sidewall layer over a first sidewall of the gate and a first sidewall of the gate dielectric layer;
forming a second insulating sidewall layer over a second sidewall of the gate and a second sidewall of the gate dielectric layer;
forming a first lightly doped drain in the well, wherein the first lightly doped drain has the second conductive type and directly contacts the first doped region and the first insulating sidewall layer; and
forming a second lightly doped drain in the well, wherein the second lightly doped drain has the second conductive type and directly contacts the second doped region and the second insulating sidewall layer,
wherein the second doped region does not contact the gate dielectric layer, and
wherein the first and second doped regions directly contact the well.
6. The method as claimed in claim 5 , wherein the first doped region, the second doped region, and the gate constitute a transistor.
7. The method as claimed in claim 5 , wherein the first conductive type is P-type, and the second conductive type is N-type.
8. The method as claimed in claim 5 , wherein the first conductive type is N-type, and the second conductive type is P-type.