Wraparound top electrode line for crossbar array resistive switching device
A method is presented for forming a semiconductor device. The method includes depositing an insulating layer over a semiconductor substrate, etching the insulating layer to form a plurality of trenches for receiving a first conducting material, forming a resistive switching memory element over at least one trench of the plurality of trenches, the resistive switching memory element having a conducting cap formed thereon, and depositing a dielectric cap over the trenches. The method further includes etching portions of the insulating layer to expose a section of the dielectric cap formed over the resistive switching memory element, etching the exposed section of the dielectric cap to expose the conducting cap of the resistive switching memory element, and forming a barrier layer in direct contact with the exposed section of the conducting cap.
1. A method for forming a semiconductor device, the method comprising:
depositing an insulating layer in direct contact with a semiconductor substrate;
etching the insulating layer to form a plurality of trenches for receiving a first conducting material;
forming a resistive switching memory element over at least one trench of the plurality of trenches, where a conducting cap is formed in direct contact with a top surface of the resistive switching memory element;
depositing a dielectric cap over the trenches;
etching portions of the insulating layer to expose a section of the dielectric cap formed over the resistive switching memory element;
etching the exposed section of the dielectric cap to expose the conducting cap of the resistive switching memory element; and
forming a barrier layer in direct contact with the exposed section of the conducting cap.
2. The method of claim 1 , wherein the dielectric cap extends over and contacts each of the plurality of trenches.
3. The method of claim 1 , wherein the first conducting material is copper (Cu).
4. The method of claim 1 , wherein the resistive switching memory element is a resistive random access memory (RRAM) device.
5. The method of claim 1 , wherein the resistive switching memory element is a conductive bridging random access memory (CBRAM) device.
6. The method of claim 1 , wherein the resistive switching memory element is covered by a spacer.
7. The method of claim 6 , wherein the spacer is a silicon nitride (SiN) spacer.
8. The method of claim 1 , further comprising depositing a second conducting material within the barrier layer.
9. The method of claim 8 , wherein the second conducting material is Cu.
10. The method of claim 1 , wherein the barrier layer includes at least of one tantalum nitride (TaN), titanium nitride (TiN), cobalt nitride (CoN), and ruthenium (RuN).
11. The method of claim 1 , wherein the conducting cap is wrapped around with the barrier layer.
12. A method for forming a semiconductor device, the method comprising:
forming a plurality of copper (Cu) contacts within an insulating layer;
forming a resistive random access memory (RRAM) device over one Cu line of the plurality of Cu lines;
forming a conducting cap in direct contact with a top surface of the RRAM device;
forming a dielectric cap that extends over and directly contacts each of the plurality of Cu lines;
selectively etching to expose the conducting cap of the RRAM device; and
forming a barrier layer in direct contact with the exposed conducting cap such that the conducting cap wraps around with the barrier layer.
13. The method of claim 12 , wherein the RRAM device is covered by a silicon nitride (SiN) spacer.
14. The method of claim 12 , wherein the barrier layer includes at least of one tantalum nitride (TaN), titanium nitride (TiN), cobalt nitride (CoN), and ruthenium (RuN).
15. A semiconductor structure incorporated within a crossbar array, the structure comprising:
a plurality of trenches formed within an insulating layer for receiving a first conducting material;
a resistive switching memory element formed over at least one trench of the plurality of trenches, where a conducting cap is formed in direct contact with a top surface of the resistive switching memory element;
a dielectric cap deposited over the trenches; and
a barrier layer formed in direct contact with an exposed section of the conducting cap such that the conducting cap wraps around with the barrier layer.
16. The structure of claim 15 , wherein the dielectric cap extends over and contacts each of the plurality of trenches.
17. The structure of claim 15 , wherein the first conducting material is copper (Cu).
18. The structure of claim 15 , wherein a second conducting material is deposited over the barrier layer.
19. The structure of claim 18 , wherein the second conducting material is Cu.
20. The structure of claim 15 , wherein the barrier layer includes at least of one tantalum nitride (TaN), titanium nitride (TiN), cobalt nitride (CoN), and ruthenium (RuN).