IP Library › Granted Patent US 1,032,386
Granted Patent S1
US 1,032,386 · App. 29/850,163 · Granted Jun 25, 2024

MEMS mass flow controller

Inventor: Liji Huang (Santa Clara, CA)
Assignee: Siargo Ltd.
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Quick Facts
Patent No.
US 1,032,386
App. No.
29/850,163
Granted
Jun 25, 2024
Kind
S1
Claims (1)

I claim the ornamental design for a MEMS mass flow controller, substantially as shown and described.