Three-dimensional stacked vertical transport field effect transistor logic gate with buried power bus
Techniques facilitating three-dimensional stacked vertical transport field effect transistor logic gates with buried power bus are provided. A logic device can comprise a plate and a first vertical transport field effect transistor formed over and adjacent the plate. The logic device can also comprise a second vertical transport field effect transistor stacked on the first vertical transport field effect transistor. The plate can be a power layer and can be continuous within regions of the device that utilize a common voltage. The plate can be contacted from a surface of the device at intervals corresponding to the regions of common voltage. The plate can be electrically connected to ground. Alternatively, the plate can be electrically connected to a power supply.
1. A method, comprising:
forming a plate over a substrate;
forming a first vertical transport field effect transistor over and adjacent the plate; and
forming a second vertical transport field effect over and adjacent the first vertical transport field effect transistor, wherein the second vertical transport field effect transistor is stacked on the first vertical transport field effect transistor, and wherein the plate is a power layer and is continuous within regions of common voltage across a device.
2. The method of claim 1 , wherein the forming the first vertical transport field effect transistor comprises forming a p-channel field effect transistor over and adjacent the plate, and wherein the forming the second vertical transport field effect transistor comprises forming an n-channel field effect transistor over the p-channel field effect transistor, and wherein the plate is electrically connected to a power supply voltage.
3. The method of claim 2 , further comprising:
contacting the plate from a surface of the device at intervals defined as a function of the regions of common voltage.
4. The method of claim 1 , wherein the forming the first vertical transport field effect transistor comprises forming an n-channel field effect transistor over and adjacent the plate, and wherein the forming the second vertical transport field effect transistor comprises forming a p-channel field effect transistor over the n-channel field effect transistor, and wherein the plate is electrically connected to ground.
5. The method of claim 4 , further comprising:
contacting the plate from a surface of the device at intervals defined as a function of the regions of common voltage.
6. The method of claim 1 , further comprising:
depositing a first bonding film on the first vertical transport field effect transistor; and
using a second bonding film of the second vertical transport field effect transistor to affix the second vertical transport field effect transistor to the first vertical transport field effect transistor.
7. The method of claim 1 , further comprising:
defining and forming one or more monolithic inter-layer vias, wherein the one or more monolithic inter-layer vias penetrate and contact respective first portions of a gate layer of the second vertical transport field effect transistor and extend to respective second portions of a second gate layer of the first vertical transport field effect transistor.
8. The method of claim 1 , further comprising:
covering the first vertical transport field effect transistor with a bonding dielectric; and
planarizing the bonding dielectric prior to the forming the second vertical transport field effect transistor.