Pressure sensor device including-fluorinated gel protective member disposed on a protective film
In aspects of the invention, a sensor unit is stored in a recessed sensor mount portion formed in a resin case. The sensor unit can be formed so that a semiconductor pressure sensor chip is joined to one side of a glass pedestal, and the other side of the glass pedestal is die-bonded to the bottom of the sensor mount portion through an adhesive. An electrode pad on the semiconductor pressure sensor chip is electrically connected through a bonding wire to a lead terminal for leading externally that pierces through the resin case and is integrally insert-molded therein. An entire surface of the sensor unit, an exposed part of the lead terminal internally-located in the resin case, the bonding wire, and an exposed part of an inner wall of the resin case can be coated with the protective film composed of a poly(p-xylylene)-family polymer including fluorine.
1. A pressure sensor device, comprising:
a sensor chip for converting pressure acting thereon into an electric signal;
a resin case for storing the sensor chip;
a lead terminal for taking out externally the electric signal output from the sensor chip, wherein one end of the lead terminal is exposed internally in the resin case and connected to the sensor chip through a wire;
a protective film composed of a poly(p-xylylene)-family polymer including fluorine, wherein the protective film coats an electrode pad of the sensor chip, an exposed part of the lead terminal internally-located in the resin case, the wire, and at least a portion of an inner wall of the resin case; and
a protective member, composed of a fluorinated gel, disposed on the protective film.
2. The pressure sensor device according to claim 1 , wherein the protective film coats an entire surface of the sensor chip and an exposed part of the inner wall of the resin case.
3. The pressure sensor device according to claim 1 , wherein the protective member is filled up internally in the resin case, and
wherein the sensor chip, the exposed part of the lead terminal internally-located in the resin case, and the wire are buried in the protective member.
4. The pressure sensor device according to claim 1 , wherein the sensor chip is a semiconductor sensor chip.