Method for fabricating electrochromic device
The present invention discloses a method for fabricating an electrochromic device, which adopts the vacuum cathodic arc-plasma deposition to comprise five layers with an ionic conduction layer (electrolyte) in contact with an electrochromic (EC) layer and an ion storage (complementary) layer, all sandwiched between two transparent conducting layers sequentially on a substrate. The method owns superior deposition efficiency and the fabricated thin film structures have higher crystalline homogeneity. In addition, thanks to the nanometer pores in the thin film structures, the electric capacity as well as the ion mobility are greater. Consequently, the reaction efficiency for bleaching or coloring is enhanced.
1. A method for fabricating electrochromic device, comprising steps of:
depositing a first transparent electrode having a plurality of island structures on a substrate using vacuum cathodic arc-plasma deposition;
depositing an ion storage layer having a plurality of first pore structures on said first transparent electrode using vacuum cathodic arc-plasma deposition;
depositing an ion transport layer having a plurality of second pore structures on said ion storage layer using vacuum cathodic arc-plasma deposition;
injecting lithium ions or hydrogen ions into said ion storage layer via said ion transport layer using a liquid solution immersion method;
depositing an electrochromic layer having a plurality of third pore structures on said ion transport layer using vacuum cathodic arc-plasma deposition; and
depositing a second transparent electrode on said electrochromic layer using vacuum cathodic arc-plasma deposition.
2. The method for fabricating electrochromic device of claim 1 , wherein the material of said first transparent electrode and said second transparent electrode is selected from the group consisting of gallium zinc oxide (GaZnO), indium tin oxide (ITO), and indium zinc tin oxide (IZTO).
3. The method for fabricating electrochromic device of claim 1 , wherein the material of said ion storage layer is selected from the group consisting of nickel vanadium oxide (NiVO), nickel oxide (NiO), and iridium oxide (IrO 2 ).
4. The method for fabricating electrochromic device of claim 1 , wherein the material of said ion transport layer is tantalum pentoxide (Ta 2 O 5 ).
5. The method for fabricating electrochromic device of claim 1 , wherein the material of said electrochromic layer is selected from the group consisting of tungsten trioxide (WO 3 ), titanium dioxide (TiO 2 ), and molybdenum oxide (MO 3 ).
6. A method for fabricating electrochromic device, comprising steps of:
depositing a first transparent electrode having a plurality of island structures on a substrate using vacuum cathodic arc-plasma deposition;
while depositing an ion storage layer on said first transparent electrode using vacuum cathodic arc-plasma deposition, adding hydrogen gas to generate hydrogen ions in the plasma reaction and enabling said ion storage layer to have a plurality of first pore structures;
depositing an ion transport layer having a plurality of second pore structures on said ion storage layer using vacuum cathodic arc-plasma deposition;
depositing an electrochromic layer having a plurality of third pore structures on said ion transport layer using vacuum cathodic arc-plasma deposition; and
depositing a second transparent electrode on said electrochromic layer using vacuum cathodic arc-plasma deposition.
7. The method for fabricating electrochromic device of claim 6 , wherein the material of said first transparent electrode and said second transparent electrode is selected from the group consisting of gallium zinc oxide (GaZnO), indium tin oxide (ITO), and indium zinc tin oxide (IZTO).
8. The method for fabricating electrochromic device of claim 6 , wherein the material of said ion storage layer is selected from the group consisting of nickel vanadium oxide (NiVO), nickel oxide (NiO), and iridium oxide (IrO 2 ).
9. The method for fabricating electrochromic device of claim 6 , wherein the material of said electrochromic layer is selected from the group consisting of tungsten trioxide (WO 3 ), titanium dioxide (TiO 2 ), and molybdenum oxide (WO 3 ).
10. The method for fabricating electrochromic device of claim 6 , wherein the material of said ion transport layer is tantalum pentoxide (Ta 2 O 5 ).