Scalable thermoelectric-based infrared detector
Device and method of forming the devices are disclosed. The method includes providing a substrate prepared with transistor and sensor regions. The substrate is processed by forming a lower sensor cavity in the substrate, filling the lower sensor cavity with a sacrificial material, forming a dielectric membrane in the sensor region, forming a transistor in the transistor region and forming a micro-electrical mechanical system (MEMS) component on the dielectric membrane in the sensor region. The method continues by forming a back-end-of-line (BEOL) dielectric having a plurality of interlayer dielectric (ILD) layers with metal and via levels disposed on the substrate for interconnecting the components of the device. The metal lines in the metal levels are configured to define an upper sensor cavity over the lower sensor cavity, and metal lines of a first metal level of the BEOL dielectric are configured to define a geometry of the MEMS component.
1. A method for forming a device comprising:
providing a substrate prepared with a transistor region and a sensor region;
processing the substrate which includes
forming a lower sensor cavity in the substrate, the lower sensor cavity having a bottom cavity surface disposed below a top surface of the substrate,
forming a reflector on the bottom cavity surface,
filling the lower sensor cavity with a sacrificial material,
forming a dielectric membrane in the sensor region, the dielectric membrane covers the sacrificial material in the lower sensor cavity,
forming a transistor in the transistor region, and
forming a micro-electrical mechanical system (MEMS) component on the dielectric membrane in the sensor region; and
forming a back-end-of-line (BEOL) dielectric disposed on the substrate having a plurality of interlayer dielectric (ILD) layers with metal and via levels, the metal levels include metal lines and the via levels include via contacts for interconnecting the components of the device, wherein the metal lines in the metal levels are configured to define an upper sensor cavity over the lower sensor cavity, and wherein metal lines of a first metal level of the BEOL dielectric are configured to define a geometry of the MEMS component.
2. The method of claim 1 , wherein the reflector is protected by a protective liner which lines sidewalls of the lower sensor cavity and covers the reflector.
3. The method of claim 2 , wherein the reflector is a metal silicide or a doped region at the lower sensor cavity.
4. The method of claim 2 , wherein forming of the MEMS component comprises:
forming a plurality of thermoelectric-based infrared sensors; and
configuring the plurality of thermoelectric-based infrared sensors to form a sensor array.
5. The method of claim 4 , wherein each of the plurality of thermoelectric-based infrared sensors comprises a thermopile line structure, the thermopile line structure includes a first line segment doped with a first thermopile material and a second line segment doped with a second thermopile material.
6. The method of claim 5 , wherein forming the transistor in the transistor region comprises:
forming a transistor well;
forming isolation regions;
forming a gate of the transistor, wherein forming the gate includes
providing a gate dielectric layer over the substrate,
disposing a polysilicon layer over the gate dielectric layer, and
patterning the gate dielectric layer and the polysilicon layer in the transistor region to form the gate;
forming source/drain (S/D) regions and extension regions adjacent to the gate; and
disposing a spacer dielectric layer over the substrate, wherein the spacer dielectric layer is etched to form spacers on sidewalls of the gate.
7. The method of claim 6 , wherein
the gate dielectric layer at the sensor region acts as an additional protective liner; and
the polysilicon layer at the sensor region is patterned to form the thermopile line structure.
8. The method of claim 7 , wherein the thermopile line structure comprises:
a first line terminal at a first end of the thermopile line structure, wherein the first end is part of the first line segment; and
a second line terminal at a second end of the thermopile line structure, wherein the second end is part of the second line segment.
9. The method of claim 7 , wherein forming the BEOL dielectric comprises:
disposing a first dielectric layer over the substrate;
forming a via opening in the first dielectric layer in the sensor region to expose an interface between the first and second line segments;
depositing a metal contact layer on the substrate;
patterning the metal contact layer to form a thermocouple contact, wherein the thermocouple contact couples the first and second line segments of the thermopile line structure; and
forming an absorber layer on the substrate in the sensor region, covering the thermocouple contact and the first dielectric layer over a center portion of the thermopile line structure.
10. The method of claim 9 , wherein forming the BEOL dielectric further comprises:
disposing a second dielectric layer over the substrate to form a first via dielectric level with the first dielectric layer; and
forming via contacts in the first via dielectric layer, wherein the via contacts are coupled to the S/D regions, the gate, well contacts, and the first and second line terminals of the thermopile line structure.
11. The method of claim 10 , wherein forming the BEOL dielectric further comprises:
forming one or more ILD levels with interconnections over the substrate;
forming a passivation layer over an uppermost metal level;
forming an etch mask over the passivation layer;
patterning the etch mask to provide an opening to expose the sensor region; and
etching the BEOL dielectric layer selective to the metal lines of the metal levels to form the upper sensor cavity and openings exposing portions of the sacrificial material in the lower sensor cavity.
12. The method of claim 11 , wherein forming the device further comprising:
forming pad openings in the passivation layer by exposing bond pads in the uppermost metal level;
forming a bottom sealing ring on the BEOL dielectric surrounding the device; and
removing the sacrificial material to form the lower sensor cavity between the reflector and the MEMS component.
13. The method of claim 4 , wherein each of the plurality of thermoelectric-based infrared sensors comprises N number of thermopile line structures and 2≤N≤3.
14. The method of claim 13 , wherein the N number of thermopile line structure are stacked such that first and second line segments of each thermopile line structure are stacked in an alternate arrangement between any two thermopile line structures, wherein
the first line segment is doped with a first thermopile material; and
the second line segment is doped with a second thermopile material.
15. The method of claim 4 , wherein each of the plurality of thermoelectric-based infrared sensors comprises 2 thermopile line structures that are stacked on in a same or different pattern, and comprises
a first thermopile line structure which includes first and second line segments that are both doped with a first thermopile material; and
a second thermopile line structure stacked above the first thermopile line structure and includes first and second line segments that are doped with a second thermopile material.
16. A method for forming a device comprising:
providing a substrate prepared with a transistor region and a sensor region;
processing the substrate which includes
forming a lower sensor cavity in the substrate, the lower sensor cavity having a bottom surface disposed below a top surface of the substrate,
filling the lower sensor cavity with a sacrificial material,
forming a dielectric membrane in the sensor region, the dielectric membrane covers the sacrificial material in the lower sensor cavity,
forming a transistor in the transistor region, and
forming a micro-electrical mechanical system (MEMS) component on the dielectric membrane in the sensor region;
wherein forming the device further comprises bonding a cap to the substrate, wherein the cap comprises
a material which can transmit infrared radiation,
a cap sealing ring,
an anti-reflective region with anti-reflection coatings disposed on front and back sides of the cap in the sensor region, wherein the anti-reflective region includes a bottom grating on an inner surface of the cap and a top grating on the outer surface of the cap,
a getter disposed on the inner surface of the cap other than in the sensor region; and
forming a back-end-of-line (BEOL) dielectric disposed on the substrate having a plurality of interlayer dielectric (ILD) layers with metal and via levels, the metal levels include metal lines and the via levels include via contacts for interconnecting the components of the device, wherein the metal lines in the metal levels are configured to define an upper sensor cavity over the lower sensor cavity, and wherein metal lines of a first metal level of the BEOL dielectric are configured to define a geometry of the MEMS component.
17. A device comprising:
a substrate including a transistor region and a sensor region;
a transistor component disposed in the transistor region;
a cavity disposed in the sensor region of the substrate, the cavity serves as a lower sensor cavity, the lower sensor cavity having a bottom cavity surface disposed below a top surface of the substrate;
a reflector disposed on the bottom cavity surface;
a membrane disposed over the cavity, the membrane forms a top of the cavity;
a micro-electrical mechanical system (MEMS) component disposed on the membrane over the cavity in the sensor region; and
a back-end-of-line (BEOL) dielectric disposed on the substrate having a plurality of interlayer dielectric (ILD) layers with metal and via levels, the metal levels include metal lines and the via levels include via contacts for interconnecting the components of the device, wherein the metal lines in the metal levels are configured to define an upper sensor cavity over the lower sensor cavity, and wherein metal lines of a first metal level of the BEOL dielectric are configured to define a geometry of the MEMS component.
18. The device of claim 17 , wherein
the reflector is a metal silicide or a doped region; and
the substrate further comprises a protective liner which lines sidewalls of the cavity and covers the reflector.
19. The device of claim 18 , wherein the MEMS component comprises a plurality of thermoelectric-based infrared sensors configured to form a sensor array, wherein each of the plurality of thermoelectric-based infrared sensors comprises a thermopile line structure, the thermopile line structure includes a first line segment doped with a first thermopile material and a second line segment doped with a second thermopile material.
20. The device of claim 19 , wherein the thermopile line structure are formed by
using metal lines in upper metal levels of the BEOL dielectric surrounding the sensor region as etch stop hard masks to define the upper sensor cavity; and
using metal lines in lower metal levels of the BEOL dielectric below the upper sensor cavity as etch stop hard masks to define the geometry of the thermopile line structure.