Structure of gas sensor
The present invention provides a structure of a gas sensor, comprising: a support, having a front side, a back side opposite to the front side, a cell region, and a peripheral region circling the cell region; a cavity, formed on the back side of the support in the cell region; a heater, disposed on the front side of the support covering the cavity; a sensing element, disposed on the heater; and a sealing layer, formed on the back side of the support covering inside the cavity.
1. A structure of a gas sensor, comprising:
a support, having a front side, a back side opposite to the front side, a cell region, and a peripheral region circling the cell region, wherein the support comprises a silicon layer at the back side and an oxide layer adjacent to the silicon layer at the front side;
a cavity, formed on the back side of the support in the cell region;
a heater, disposed on the front side of the support covering the cavity;
a sensing element, disposed on the heater;
an interconnect structure formed in the oxide layer in the peripheral region, wherein the interconnect structure comprises a plurality of interconnect metal layers; and
a sealing layer, formed on the back side of the support covering inside the cavity, wherein the sealing layer conformally covers on the back side of the support and in the cavity.
2. The structure of the gas sensor according to claim 1 , wherein the silicon layer is a crystalline silicon layer having a thickness in a range of 290-450 micrometers.
3. The structure of the gas sensor according to claim 2 , wherein the thickness of the silicon layer is in a range of 350-400 micrometers.
4. The structure of the gas sensor according to claim 1 , wherein the oxide layer has a thickness in a range of 6-50 micrometers.
5. The structure of the gas sensor according to claim 1 , wherein the sealing layer has a thickness in a range of 500-10000 angstroms.
6. The structure of the gas sensor according to claim 1 , wherein the sealing layer has a thickness in a range of 1000-6000 angstroms.
7. The structure of the gas sensor according to claim 1 , wherein a material of the sealing layer is selected from silicon nitride and polyamide.
8. The structure of the gas sensor according to claim 1 , wherein the heater is embedded in a dielectric layer, and the dielectric layer is disposed directly on the support.
9. The structure of the gas sensor according to claim 1 , wherein a depth of the cavity is in a range of 300-500 micrometers.
10. The structure of the gas sensor according to claim 1 , wherein a diameter of the cavity is in a range of 250-700 micrometers.