Semiconductor device, method of positioning semiconductor device, and positioning apparatus for semiconductor device
A semiconductor device includes: a semiconductor chip that has a first connection terminal for wiring connection; a substrate that has a second connection terminal for wiring connection, the second connection terminal being electrically connected to the first connection terminal; and a reflective surface that reflects light from the first connection terminal and the second connection terminal in a thickness direction of the substrate or the semiconductor chip.
1. A positioning system comprising:
a semiconductor device comprising:
a semiconductor chip having a plurality of first connection terminals for wiring connection and a first alignment mark on a connection surface to a substrate;
the substrate having a plurality of second connection terminals for wiring connection on a first surface facing the connection surface of the semiconductor chip and having a second alignment mark on a second surface facing an opposition direction of the first surface, the first surface and the second surface being offset in a thickness direction of the substrate, the plurality of second connection terminals being electrically connected to the plurality of first connection terminals; and
a reflective surface for reflecting light from the plurality of first connection terminals and the plurality of second connection terminals, the reflective surface being angled relative to the connection surface of the semiconductor chip such that light from the plurality of first connection terminals and light from the plurality of second connection terminals are reflected by the reflective surface in the thickness direction; and
a positioning apparatus comprising:
a stage configured to fix the semiconductor chip and configured to be movable within one plane;
a tool configured to suction and fix the substrate, and configured to mount the substrate on the semiconductor chip;
an imaging sensor configured to image the reflective surface to capture images of the plurality of first connection terminals and the plurality of second connection terminals projected on the reflective surface and reflected in the thickness direction, and configured to capture images of the first alignment mark and the second alignment mark without using the reflective surface; and
a controller comprising hardware, the controller being configured to control movement of the stage based on the images of the plurality of first connection terminals and the plurality of second connection terminals projected on the reflective surface and captured by the imaging sensor, and based on the images of the first alignment mark and the second alignment mark captured by the imaging sensor.
2. The positioning apparatus according to claim 1 , wherein the controller is configured to perform positioning of at least one of the substrate and the semiconductor chip in an array direction of the images of the plurality of first connection terminals and the plurality of second connection terminals projected on the reflective surface by pattern matching with respect to positions of the images of the plurality of first connection terminals and the plurality of second connection terminals projected on the reflective surface.
3. The positioning apparatus according to claim 1 , wherein the controller is configured to perform positioning of at least one of the substrate and the semiconductor chip in a direction orthogonal to an array direction of the images of the plurality of first connection terminals and the plurality of second connection terminals projected on the reflective surface by focus adjustment of the images of the plurality of first connection terminals and the plurality of second connection terminals projected on the reflective surface.