Multilayer wiring board
A multilayer wiring board having a high degree of freedom of wiring design and realizing high-density wiring, and a method to simply manufacture the multilayer wiring board is provided. A core substrate with two or more wiring layers provided thereon through an electrical insulating layer. The core substrate has a plurality of throughholes filled with an electroconductive material, and the front side and back side of the core substrate have been electrically connected to each other by the electroconductive material. The throughholes have an opening diameter in the range of 10 to 100 μm. An insulation layer and an electroconductive material diffusion barrier layer are also provided, and the electroconductive material is filled into the throughholes through the insulation layer. A first wiring layer provided through an electrical insulating layer on the core substrate is connected to the electroconductive material filled into the throughhole through via.
1. A multilayer wiring board comprising: a core substrate; and two or more wiring layers provided through an electrical insulating layer on the core substrate, wherein
the core substrate is a glass core substrate and has a plurality of throughholes filled with an electroconductive material for electrical conduction between a front side and back side of the core substrate, the throughholes have an opening diameter in the range of 10 to 100 μm, an insulation layer and an electroconductive material diffusion barrier layer preventing the diffusion of the electroconductive material into the core substrate are provided on an inner wall surface of the throughholes, the electroconductive material has been filled into the throughholes through the insulation layer, a via connected to the electroconductive material is disposed immediately above the throughholes and a first wiring layer of the two or more wiring layers is provided on the core substrate through the electrical insulating layer and is connected to the electroconductive material within the throughhole through the via,
the insulation layer comprises a first insulation layer and a second insulation layer, and the insulation layer and the electroconductive material diffusion barrier layer are stacked on the inner wall surface within the throughholes in the order of the first insulation layer, the electroconductive material diffusion barrier layer, and the second insulation layer, and
the first insulation layer and the second insulation layer are formed of an identical material.
2. The multilayer wiring board according to claim 1 , wherein the electroconductive material diffusion barrier layer is a thin film of titanium nitride.
3. The multilayer wiring board according to claim 1 , wherein the insulation layer is a thin film of silicon dioxide.
4. The multilayer wiring board according to claim 1 , wherein the insulation layer further comprises a third insulation layer in addition to the first and second insulation layers, the insulation layer and the electroconductive material diffusion barrier layer are stacked on the inner wall surface within the throughholes in the order of the first insulation layer, the electroconductive material diffusion barrier layer, the second insulation layer and the third insulation layer, and the second insulation layer and third insulation layer have an identical chemical composition.
5. The multilayer wiring board according to claim 1 , wherein the electroconductive material is copper provided within the throughholes by electroplating.
6. The multilayer wiring board according to claim 1 , wherein the electroconductive material is an electroconductive paste filled into the throughholes.
7. The multilayer wiring board according to claim 1 , wherein the opening diameter of the throughholes is in the range of 10 to 70 μm.
8. The multilayer wiring board according to claim 1 , wherein a thickness of the core substrate is in the range of 50 to 725 μm.