Test board for semiconductor device and test system including the same
A test board for a semiconductor device and a test board including the same are provided. A test board includes a substrate, a mounting pad which is formed on the substrate and on which a semiconductor chip is mounted and a test terminal group arranged on the substrate to be spaced apart from the mounting pad and electrically connected to the semiconductor chip by a pattern arranged on the substrate, wherein the semiconductor chip includes a first terminal and a second terminal for inputting/outputting signals, the test terminal group includes a first test terminal electrically connected to the first terminal and a second test terminal electrically connected to the second terminal, a first voltage is applied to the first terminal and the second terminal, and a stress signal that is caused by a second voltage is applied to the first test terminal.
1. A test board for a semiconductor device, comprising:
a substrate;
a mounting pad which is formed on the substrate and on which a semiconductor chip is mounted;
a test terminal group arranged on the substrate to be spaced apart from the mounting pad and electrically connected to the semiconductor chip by a pattern arranged on the substrate,
wherein:
the semiconductor chip includes a first terminal and a second terminal configured to input/output signals,
the test terminal group includes a first test terminal electrically connected to the first terminal and a second test terminal electrically connected to the second terminal,
both the first terminal and the second terminal are configured to receive a first voltage,
the first test terminal is configured to receive a stress signal that is caused by a second voltage, and
the test board further includes a first switch electrically connected to the first test terminal and a second switch electrically connected to the second test terminal, a ground terminal connected to a ground voltage, and a power terminal connected to a supply voltage.
2. The test board of claim 1 , wherein the stress signal has a first peak current having a value of 7.5 A at 0.8 ns, and a second peak current having a value equal to or smaller than 1 A at 20 ns.
3. The test board of claim 2 , wherein the first voltage is a ground voltage.
4. The test board of claim 2 , wherein the second voltage is a stress voltage having a value equal to or higher than 15 kV.
5. The test board of claim 1 ,
wherein the first switch connects the first test terminal to the ground terminal or the power terminal, and
wherein the second switch connects the second test terminal to the ground terminal or the power terminal.
6. The test board of claim 1 , wherein the test terminal group is arranged on the substrate along a periphery of the mounting pad.
7. The test board of claim 1 , wherein the semiconductor chip further comprises a ground line that connects the first terminal and the second terminal to each other.
8. A test board for a semiconductor device, comprising:
a substrate;
a mounting pad which is formed on the substrate and on which a semiconductor chip is mounted;
a test terminal group arranged on the substrate to be spaced apart from the mounting pad and electrically connected to the semiconductor chip by a pattern arranged on the substrate,
wherein:
the semiconductor chip includes a first terminal and a second terminal configured to input/output signals,
the test terminal group includes a first test terminal electrically connected to the first terminal and a second test terminal electrically connected to the second terminal,
both the first terminal and the second terminal are configured to receive a first voltage,
the first test terminal is configured to receive a stress signal that is caused by a second voltage,
the semiconductor chip further comprises a first inverter connected to the first terminal and a second inverter connected to the second terminal to receive a signal from the first inverter, and
the stress signal is provided to the first terminal and is transferred to the second inverter.
9. The test board of claim 8 , wherein the semiconductor chip further comprises a connection line that connects the first inverter and the second inverter to each other.
10. A test system of a semiconductor device, comprising:
an electrostatic discharge (ESD) simulator including an RC equivalent circuit model to generate a stress signal;
a test board configured to receive the stress signal from the ESD simulator; and
an analyzer configured to monitor the test board,
wherein the test board includes:
a substrate;
a mounting pad on which a semiconductor chip that includes a first terminal and a second terminal is mounted; and
a first test terminal and a second test terminal arranged on the substrate and respectively connected to the first terminal and the second terminal of the semiconductor chip,
wherein both the first terminal and the second terminal are configured to receive a ground voltage, and
the semiconductor chip is configured to receive the stress signal through the first test terminal.
11. The test system of claim 10 , wherein internal resistance of the RC equivalent circuit is between 5 kΩ to 10 kΩ and internal capacitance thereof is between 100 pF to 150 pF.
12. The test system of claim 10 , wherein the analyzer is configured to monitor whether current that is output to the second terminal is increased by the stress signal.
13. The test system of claim 12 , wherein:
the semiconductor chip comprises a first inverter electrically connected to the first terminal and a second inverter configured to receive an output of the first inverter,
the first inverter includes a first PMOS transistor connected to a supply voltage and a first NMOS transistor connected to the first terminal, and
the second inverter includes a second PMOS transistor connected to the supply voltage and a second NMOS transistor connected to the second terminal.
14. The test system of claim 13 , wherein current that is output to the second terminal is leakage current of the NMOS transistor caused by the stress signal.
15. The test system of claim 10 , wherein the test board further comprises:
a first terminal to which a supply voltage is applied;
a second terminal to which the ground voltage is applied;
a first switch configured to alternatively connect the first test terminal to the first terminal or the second terminal; and
a second switch configured to alternatively connect the second test terminal to the first terminal or the second terminal.
16. The test system of claim 13 , wherein:
the first inverter and the second inverter are connected to each other by a connection line, and
one end of the connection line is connected to drain terminals of the first PMOS transistor and the first NMOS transistor of the first inverter and the opposite end of the connection line is connected to gate terminals of the second PMOS transistor and the second NMOS transistor of the second inverter.
17. The test system of claim 13 , wherein:
the ground line connects the first terminal and the second terminal of the semiconductor chip is connected to each other by a ground line, and
one end of the ground line is connected to a source terminal of the first NMOS transistor and the opposite end of the ground terminal is connected to a source terminal of the second NMOS transistor.