Reduction of surface roughness in epitaxially grown germanium by controlled thermal oxidation
Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of germanium. In some embodiments, the surface roughness is further reduced by controlling a rate of the thermal oxidation. In some embodiments, the surface roughness is reduced by thermal annealing.
1. A method for reducing surface roughness in germanium, the method comprising:
obtaining a substrate that includes a layer of germanium that has a top surface having a first surface roughness;
depositing a capping layer of silicon oxide on the top surface of the layer of germanium so that the capping layer covers the entire top surface of the layer of germanium; and
subsequent to the depositing, oxidizing the top surface of the layer of germanium through thermal oxidation by diffusing oxygen through the capping layer into the layer of germanium so that the top surface of the layer of germanium is converted into a layer of germanium oxide located on top of an unoxidized layer of germanium, causing a top surface of the unoxidized layer of germanium to have a second surface roughness that is less than the first surface roughness.
2. The method of claim 1 , further comprising:
removing at least a subset of the layer of germanium oxide.
3. The method of claim 1 , wherein the substrate is a silicon substrate with the layer of germanium thereon.
4. The method of claim 3 , wherein the layer of germanium is a layer of epitaxially grown germanium.
5. The method of claim 1 , wherein the layer of germanium is a layer of epitaxially grown germanium.
6. The method of claim 1 , wherein the layer of germanium is at least 10 nm thick.
7. The method of claim 1 , wherein the layer of germanium is no more than 5000 nm thick.
8. The method of claim 1 , wherein the capping layer of silicon oxide is low temperature silicon oxide.
9. The method of claim 1 , wherein the capping layer of silicon oxide is deposited at a temperature between 100° C. and 500° C.
10. The method of claim 1 , wherein the capping layer of silicon oxide is less than 100 nm thick.
11. The method of claim 1 , further comprising:
subsequent to the depositing of the capping layer of silicon oxide, processing the layer of germanium with ion implantation.
12. The method of claim 1 , wherein the layer of germanium is ion implanted.
13. The method of claim 1 , wherein oxidizing the top surface of the layer of germanium through thermal oxidation includes maintaining the layer of germanium at a temperature between 100° C. and 650° C.
14. The method of claim 13 , wherein oxidizing the top surface of the layer of germanium through thermal oxidation includes exposing the substrate to a flow of O 2 at less than 10 sccm.
15. The method of claim 1 , wherein oxidizing the top surface of the layer of germanium through thermal oxidation includes exposing the substrate to a flow of O 2 at less than 10 sccm.