Self-aligned and misalignment-tolerant landing pad for magnetoresistive random access memory
A semiconductor device and a method for fabricating the same. The semiconductor device includes a substrate and at least one trench line formed within the substrate. The semiconductor device further includes a self-aligned landing pad in contact with the at least one trench line, and a magnetic tunnel junction stack formed on and in contact with the self-aligned landing pad. The method includes forming a conductive layer on and in contact with at least one trench line formed within a substrate. Magnetic tunnel junction stack layers are deposited on and in contact with the conductive layer. The magnetic tunnel junction stack layers are etched to form a magnetic tunnel junction stack, where the etching stops on the conductive layer.
1. A method for fabricating a semiconductor device, the method comprising:
forming a pad layer in contact with a top surface and a recessed portion of at least one trench line formed within a substrate;
depositing magnetic tunnel junction stack layers on and in contact with the pad layer; and
etching the magnetic tunnel junction stack layers to form a magnetic tunnel junction stack, where the etching stops on the pad layer.
2. The method of claim 1 , further comprising:
prior to forming the pad layer, forming a trench within a substrate;
forming a liner within the trench; and
forming the at least one trench line within the trench and in contact with the liner.
3. The method of claim 1 , further comprising:
prior to depositing the magnetic tunnel junction stack layers, planarizing the pad layer.
4. The method of claim 1 , wherein etching the magnetic tunnel junction stack layers to form a magnetic tunnel junction stack comprises:
forming a hardmask on the magnetic tunnel junction stack layers; and
etching portions of the magnetic tunnel junction stack layers not underlying the hardmask.
5. The method of claim 4 , further comprising:
etching portions of the pad layer not underlying the hardmask and above the substrate.
6. The method of claim 5 , wherein etching portions of the pad layer exposes at least a top surface of the substrate and a surface of the pad layer within a recessed area of the at least one trench line.
7. The method of claim 1 , further comprising:
depositing a spacer material over and in contact with the pad layer, the magnetic tunnel junction stack, and the hardmask.
8. The method of claim 7 , further comprising:
etching the spacer material to form a spacer on sidewalls of the magnetic tunnel junction stack, and the hardmask.
9. The method of claim 8 , further comprising:
etching portions of the pad layer not underlying the spacer.