Method for producing high-photoelectric-conversion-efficiency solar cell and high-photoelectric-conversion-efficiency solar cell
A method for producing a solar cell, which produces a single-crystal silicon solar cell by using a single-crystal silicon substrate, including: a high-temperature heat treatment process in which the single-crystal silicon substrate is subjected to heat treatment at 800° C. or higher and 1200° C. or lower, wherein the high-temperature heat treatment process includes a conveying step of loading the single-crystal silicon substrate into a heat treatment apparatus, a heating step of heating the single-crystal silicon substrate, a temperature keeping step of keeping the single-crystal silicon substrate at a predetermined temperature of 800° C. or higher and 1200° C. or lower, and a cooling step of cooling the single-crystal silicon substrate, and, in the high-temperature heat treatment process, the length of time during which the temperature of the single-crystal silicon substrate is 400° C. or higher and 650° C. or lower is set at 5 minutes or less throughout the conveying step and the heating step.
1. A method for producing a solar cell, which produces a single-crystal silicon solar cell by using a single-crystal silicon substrate, the method comprising:
a high-temperature heat treatment process in which the single-crystal silicon substrate is subjected to heat treatment at 800° C. or higher and 1200° C. or lower in a quartz furnace, wherein
the single-crystal silicon substrate that is used in production of the solar cell is a single-crystal silicon substrate whose initial interstitial oxygen concentration is 12 ppma (JEIDA) or more,
the high-temperature heat treatment process comprises:
a conveying step of loading the single-crystal silicon substrate into a heat treatment apparatus,
a heating step of heating the single-crystal silicon substrate,
a temperature keeping step of keeping the single-crystal silicon substrate at a predetermined temperature of 800° C. or higher and 1200° C. or lower, and
a cooling step of cooling the single-crystal silicon substrate, and in the high-temperature heat treatment process, a length of time during which a temperature of the single-crystal silicon substrate is 400° C. or higher and 650° C. or lower is set at 5 minutes or less throughout the conveying step and the heating step, and the high-temperature heat treatment process is performed by a batch process.
2. The method for producing a solar cell according to claim 1 , wherein
in a first high-temperature heat treatment process in a production of the solar cell from the single-crystal silicon substrate, the length of time during which the temperature of the single-crystal silicon substrate is 400° C. or higher and 650° C. or lower is set at 5 minutes or less.
3. The method for producing a solar cell according to claim 2 , wherein
the high-temperature heat treatment process is performed in an atmosphere containing an inert gas.
4. The method for producing a solar cell according to claim 3 , wherein
the inert gas is nitrogen or argon.
5. The method for producing a solar cell according to claim 2 , wherein
the high-temperature heat treatment process is performed in an atmosphere containing oxygen or water.
6. The method for producing a solar cell according to claim 1 , wherein
the high-temperature heat treatment process is performed in an atmosphere containing an inert gas.
7. The method for producing a solar cell according to claim 6 , wherein
the inert gas is nitrogen or argon.
8. The method for producing a solar cell according to claim 1 , wherein
the high-temperature heat treatment process is performed in an atmosphere containing oxygen or water.
9. The method for producing a solar cell according to claim 1 , wherein
in the conveying step, the single-crystal silicon substrate is placed in a hot zone of the heat treatment apparatus in 10 minutes or less.
10. The method for producing a solar cell according to claim 1 , wherein
the single-crystal silicon substrate is a CZ single-crystal silicon substrate.
11. The method for producing a solar cell according to claim 1 , wherein
an amount of oxygen precipitates contained in the single-crystal silicon substrate after production of the solar cell is set at 2 ppma (JEIDA) or less.
12. A solar cell produced by the method for producing a solar cell according to claim 1 , wherein
the solar cell has no swirls in electroluminescence or photoluminescence of the single-crystal silicon substrate in the single-crystal silicon solar cell.
13. A photovoltaic module comprising the solar cells according to claim 12 electrically connected to each other.
14. A photovoltaic power generation system comprising a plurality of the photovoltaic modules according to claim 13 electrically connected to each other.
15. A single-crystal silicon solar cell comprising a CZ single-crystal silicon substrate, wherein
an amount of oxygen precipitates contained in the CZ single-crystal silicon substrate is 2 ppma (JEIDA) or less,
a residual interstitial oxygen concentration contained in the CZ single-crystal silicon substrate is 10 ppma (JEIDA) or more, and
the solar cell has no swirls in electroluminescence or photoluminescence when light with a wavelength of 700 to 900 nm is applied as an excitation light source of the CZ single-crystal silicon substrate in the single-crystal silicon solar cell.
16. A photovoltaic module comprising the solar cells according to claim 15 electrically connected to each other.
17. A photovoltaic power generation system comprising a plurality of the photovoltaic modules according to claim 16 electrically connected to each other.