Semiconductor random access memory and manufacturing method thereof
The present disclosure discloses a resistive random access memory (RRAM) and a method for manufacture the RRAM. The method includes: providing a bottom interconnection layer; forming a bottom dielectric layer above the bottom interconnection layer, the bottom dielectric layer comprising a via through the bottom dielectric layer that exposes a portion of the bottom interconnection layer; and forming a bottom electrode layer in the via, the bottom electrode layer including a first electrode selectively grown above the bottom interconnection layer. The bottom electrode layer manufactured in such a way provides improved filling capability of the bottom electrode layer in the via.
1. A method for manufacturing a resistive random access memory (RRAM), comprising:
providing a metal bottom interconnection layer;
forming a bottom dielectric layer above the metal bottom interconnection layer, the bottom dielectric layer comprising a via through the bottom dielectric layer that exposes a portion of the metal bottom interconnection layer; and
forming a bottom electrode layer in the via, the bottom electrode layer comprising a first electrode being only formed above the metal bottom interconnection layer, wherein the first electrode is selectively grown above the metal bottom interconnection layer using a chemical vapor deposition (CVD) process.
2. The method according to claim 1 , wherein the CVD process comprises:
introducing reaction gas C 7 H 5 CoO 2 with a gas flow from 10 sccm to 50 sccm in a reaction chamber, within a temperature range from 100° C. to 300° C., and within a pressure range from 0.1 Torr to 100 Torr.
3. The method according to claim 1 , wherein the bottom electrode layer further comprises a second electrode above the first electrode.
4. The method according to claim 3 , wherein a thickness of the second electrode is less than a thickness of the first electrode.
5. The method according to claim 3 , wherein forming the bottom electrode layer in the via comprises:
depositing, above the metal bottom interconnection layer, a first electrode that selectively grows on the metal bottom interconnection layer and fills a part of the via;
forming a second electrode above the bottom dielectric layer and above the first electrode; and
performing planarization on the second electrode to remove a part of the second electrode above the bottom dielectric layer.
6. The method according to claim 1 , further comprising:
forming a data storage layer above the bottom electrode layer; and
forming a top electrode layer above the data storage layer.
7. The method according to claim 6 , wherein the data storage layer comprises a switch layer above the bottom electrode layer and a glue layer above the switch layer, wherein the top electrode layer is formed above the glue layer.
8. The method according to claim 6 , wherein the top electrode layer comprises a metal electrode layer above the data storage layer and a top protection layer above the metal electrode layer.
9. The method according to claim 6 , further comprising:
forming a patterned hard mask layer above the top electrode layer;
using the patterned hard mask layer as a mask to etch the top electrode layer and the data storage layer to form a patterned top electrode layer and a patterned data storage layer below the patterned hard mask layer;
removing the patterned hard mask layer;
forming a barrier layer to cover the patterned top electrode layer and the patterned data storage layer; and
forming a top interconnection layer that penetrates the barrier layer and connects with the top electrode layer.