Method for manufacturing biochip having improved fluorescent signal sensing properties and biochip manufactured by the same

1. A biochip having improved fluorescent signal sensing properties, comprising:

a bio-layer embedded with light emitting devices each of which has a metal wiring layer lying thereunder, and formed with a plurality of reaction regions each of which a biochemical reaction between a reference sample and a target sample to take place;

a filter layer formed under the bio-layer; and

a light sensor layer which is formed under the filter layer, and in which a plurality of light sensing units are formed,

wherein the filter layer is formed by planarizing an upper portion of the light sensor layer and stacking nanoscale thin films through an atomic layer deposition (ALD) process, and light emitted from each of the light emitting devices is blocked from being incident on the corresponding light sensing unit,

wherein the light sensor layer further comprises:

an image signal processor configured for analyzing and processing a signal output from the bio-layer, and

wherein the filter layer comprises:

a color filter layer formed over the planarized light sensor layer;

an overcoating and passivation layer formed over the color filter layer; a fluorescent-excitation-light band-reject-filter layer formed over the overcoating and passivation layer; and

an insulation film layer formed by stacking nanoscale oxide or nitride thin films over the fluorescent-excitation-light hand-reject-filter layer.

2. The biochip according to claim 1 , further comprising, in the bio-layer:

a light emitting device controller configured for controlling operation of the light emitting devices; and

a temperature sensor configured for sensing a temperature in each of the reaction regions and controlling start and finish of a bio-reaction.

3. The biochip according to claim 1 , wherein the image signal processor comprises:

a first memory which is configured to sense signals reflected by the bio-layer before a fluorescent reaction is performed, integrate the signals, calculate a mean value of electrical signals in pixels, and then store the mean value;

a second memory which is configured to sense signals reflected by the bio-layer after the fluorescent reaction is performed, integrate the signals, calculate a mean value of electrical signals in pixels, and then store the mean value; and

a comparison unit which is configured to compare the mean values stored in the first memory and the second memory and thus obtain a signal value resulting from the fluorescent reaction, wherein the image signal processor is configured to remove temporal noise in pixels and thus enhance sensitivity.

4. The biochip according to claim 1 , wherein the bio-layer comprises:

the metal wiring layer formed over the filter layer and provided for light blocking and wiring;

the light emitting devices provided over the metal wiring layer; and

dam-shaped structures formed on the upper surface of the filter layer to form the plurality of reaction regions each of which is configured for the biochemical reaction between the reference sample and the target sample to take place,

wherein the light emitting devices are formed vertically over the respective light sensing units so that light emitted from each of the light emitting devices is blocked from being incident on the corresponding light sensing unit.

5. The biochip according to claim 1 , wherein the bio-layer comprises:

the metal wiring layer formed over the filter layer and provided for light blocking and wiring;

the light emitting devices formed over the metal wiring layer; and

dam-shaped structures formed over the light emitting devices,

wherein the plurality of reaction regions, each of which is configured for the biochemical reaction between the reference sample and the target sample to take place, are formed between the dam-shaped structures, and the light emitting devices are formed vertically over the light sensing units so that light emitted from each of the light emitting devices is blocked from being incident on the corresponding light sensing unit.

6. The biochip according to claim 1 , wherein the bio-layer comprises:

dam-shaped structures formed on the upper surface of the filter layer to form the plurality of reaction regions in each of which the biochemical reaction between the reference sample and the target sample takes place; and

light emitting devices formed on outer side surfaces of the dam-shaped structures,

wherein an inner surface of each of the dam-shaped structures is formed in a lens shape so that light emitted from each of the light emitting devices is prevented from being reflected by the dam-shaped structure and being incident on the corresponding light sensing unit.

7. The biochip according to claim 4 , wherein each of the dam-shaped structures is made of at least one selected from among silicone (Si), glass, plastic, sapphire, photoresist, diamond, grapheme and metal.

8. The biochip according to claim 4 , further comprising:

an isolation cover covering the dam-shaped structures and isolating the reaction regions.

9. The biochip according to claim 4 , wherein thicknesses and lengths of each of the light emitting devices and the metal wiring layer and the length of the associated light sensing unit are determined by following equations,

tan θ= t L ×( W M −W L )/2

W PS =t M /tan θ

W P =2 W PS +W M

where,

θ denotes an angle between an upper surface of the light sensing unit and a linear connecting an edge of an upper surface of the light emitting device, a corresponding edge of an upper surface of the metal wiring layer and a corresponding edge of an upper surface of the light sensing unit, t L denotes a thickness of the light emitting device, t M denotes a thickness of the metal wiring layer, W L denotes a length of the light emitting device, W M denotes a length of the metal wiring layer, W P denotes a length of the light sensing unit, W PS denotes a length of a portion of the upper surface of the light sensing unit above which the metal wiring layer is not present.

10. The biochip according to claim 1 , wherein the light sensing units comprise:

unit photodiodes having a same size, or a repetitive array of photodiodes having sizes integer times the size of the unit photodiodes.