IP Library › Granted Patent US 10,770,433
Granted Patent B1
US 10,770,433 · App. 16/287,635 · Granted Sep 8, 2020

High bandwidth die to die interconnect with package area reduction

Inventors: Chonghua Zhong (Cupertino, CA); Jun Zhai (Cupertino, CA); Kunzhong Hu (Cupertino, CA)
Assignee: APPLE INC.
H01L25/0657H01L23/24H01L23/5385H01L23/5389H01L24/08H01L24/16H01L24/24H01L24/32H01L24/73H01L25/18H01L25/50H01L2224/08225H01L2224/16225H01L2224/24155H01L2224/24226H01L2224/32145H01L2224/32225H01L2224/73267H01L2225/06527H01L2225/06548H01L2225/06562H01L2225/06586
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Quick Facts
Patent No.
US 10,770,433
App. No.
16/287,635
Granted
Sep 8, 2020
Kind
B1
Abstract

Package structure with folded die arrangements and methods of fabrication are described. In an embodiment, a package structure includes a first die and vertical interposer side-by-side. A second die is face down on an electrically connected with the vertical interposer, and a local interposer electrically connects the first die with the vertical interposer.

Claims (37)

1. A package structure comprising:

a first wiring layer including a first side and a second side opposite the first side;

a first die and a vertical interposer side-by-side on the first side of the first wiring layer, wherein the vertical interposer includes electrical interconnects from a first side of the vertical interposer coupled with the first side of the first wiring layer to a second side of the vertical interposer opposite the first side of the vertical interposer;

a second die face down on and electrically connected with the second side of the vertical interposer; and

a local interposer on the second side of the first wiring layer and in electrical connection with the first die and the vertical interposer;

wherein the second die occupies a larger area than both the vertical interposer and the local interposer.

2. The package structure of claim 1 , wherein the local interposer includes a plurality of terminals on a first side of the local interposer that is coupled with the second side of the first wiring layer, and the local interposer does not include a terminal on a second side of the local interposer opposite the first side of the local interposer.

3. The package structure of claim 1 , wherein the first die occupies a larger area than the second die.

4. The package structure of claim 3 , wherein the first die and the second die comprise split logic.

5. The package structure of claim 3 , wherein first transistors of the first die are formed with a smaller processing node than second transistors of the second die.

6. The package structure of claim 1 , further comprising a mechanical chiplet attached to the first die laterally adjacent to the second die.

7. The package structure of claim 1 , wherein the vertical interposer is hybrid bonded with the second die.

8. The package structure of claim 1 , wherein solder bumps electrically connect the vertical interposer with the second die.

9. A package structure comprising:

a first wiring layer including a first side and a second side opposite the first side;

a first die and a vertical interposer side-by-side on the first side of the first wiring layer, wherein the vertical interposer includes electrical interconnects from a first side of the vertical interposer coupled with the first side of the first wiring layer to a second side of the vertical interposer opposite the first side of the vertical interposer;

a second die face down on and electrically connected with the second side of the vertical interposer;

a local interposer on the second side of the first wiring layer and in electrical connection with the first die and the vertical interposer;

a first molding compound encapsulating the first die, the vertical interposer, and the second die; and

a second molding compound encapsulating the local interposer on the second side of the first wiring layer.

10. The package structure of claim 9 , further comprising a mechanical chiplet attached to the first die laterally adjacent to the second die.

11. The package structure of claim 9 , further comprising a first plurality of conductive pillars extending from the first wiring layer and through the first molding compound.

12. The package structure of claim 9 , wherein first transistors of the first die are formed with a smaller processing node than second transistors of the second die.

13. The package structure of claim 9 , further comprising a second plurality of conductive pillars extending from the first wiring layer and through the second molding compound.

14. The package structure of claim 13 , further comprising a second wiring layer on the second molding compound and connected to the second plurality of conductive pillars.

15. The package structure of claim 14 , wherein the second wiring layer is on a planarized surface including the second molding compound, the second plurality of conductive pillars, and the local interposer.

16. The package structure of claim 13 , further comprising a second package on and in electrical connection with the first plurality of conductive pillars.

17. The package structure of claim 13 , further comprising a plurality of solder bumps that electrically connect the second wiring layer to a package routing substrate.

18. A method of forming a package structure comprising:

placing a second die and mechanical chiplet on a carrier substrate;

bonding a vertical interposer to the second die;

placing a first die on the second die and the mechanical chiplet;

encapsulating the second die, the mechanical chiplet, the vertical interposer, and the first die in a first molding compound;

mounting a local interposer on and in electrical connection with the vertical interposer and the first die; and

encapsulating the local interposer in a second molding compound.

19. The method of claim 18 , wherein bonding the vertical interposer to the second die comprises hybrid bonding.

20. The method of claim 18 , wherein bonding the vertical interposer to the second die comprises solder bumping.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2019
From: ZHONG, CHONGHUA; ZHAI, JUN; HU, KUNZHONG
To: APPLE INC.
Reel/Frame 048459/0112 →
Cited By (3)
US 12,368,137 US 12,710,606 US 12,740,450