Electrode plate and surface treatment method thereof
View Patent ↗The disclosure provides an electrode plate and a surface treatment method thereof. The surface treatment method firstly adopts a special annealing process to process the electrode plate to form a Mg film on the surface of the MgAl alloy material layer, and then make the Mg film chemically react with the fluoride ion to form a MgF 2 film on the surface of the Mg film or the Mg film is converted into a MgF 2 filmentirely. Due to the dense structure and chemical stability of MgF 2 film, the fluoride ion corrosion resistance of the electrode plate is improved. The surface of the electrode plate of the disclosure includes a MgF 2 film capable of being used as a protective layer to protect the MgAl alloy material layer. Therefore, the electrode plate has excellent corrosion resistance against fluoride ions and can improve the quality of film formation by chemical vapor deposition.
1. A surface treatment method of an electrode plate, comprising the following steps:
step 1: providing an electrode plate, wherein the electrode plate comprises a magnesium-aluminum alloy material layer;
annealing the electrode plate to make a part of a magnesium element be precipitated from the magnesium-aluminum alloy material layer to form a magnesium film on a surface of the magnesium-aluminum alloy material layer;
step 2: arranging the electrode plate in a closed chamber, introducing a plasma containing fluorine ions into the closed chamber and the magnesium film on the surface of the electrode plate chemically reacts with fluorine ions and form a magnesium fluoride film on the surface of the electrode plate.
2. The surface treatment method of the electrode plate according to claim 1 , wherein in the step 2, when the magnesium film completely reacts, the magnesium film is converted into the magnesium fluoride film entirely.
3. The surface treatment method of the electrode plate according to claim 1 , wherein in the step 1, an annealing temperature of the electrode plate is from 500° C. to 700° C., and a heat preservation time is from 30 minutes to 2 hours.
4. The surface treatment method of the electrode plate according to claim 1 , wherein a content of the magnesium element in the magnesium-aluminum alloy material layer is from 0.2 wt % to 2 wt %.
5. The surface treatment method of the electrode plate according to claim 1 , wherein a thickness of the magnesium film obtained in the step 1 is from 5 to 10 μm.
6. The surface treatment method of the electrode plate according to claim 1 , wherein in the step 2, the plasma containing fluorine ion is a plasma of fluorine-containing gas; wherein the fluorine-containing gas comprises one or more of NF 3 and SF 6 .
7. The surface treatment method of the electrode plate according to claim 6 , wherein the electrode plate is an electrode plate configured to generate a radio frequency electric field in a PECVD apparatus, and a number of the electrode plates is two and the two electrode plates are oppositely arranged to each other;
wherein a specific operation of the step 2 is as follows: introducing the fluorine-containing gas into the PECVD apparatus and energizing the two electrode plates oppositely arranged to each other to make the two electrode plates generate the radio frequency electric field, then the fluorine-containing gas dissociates into the plasma containing fluorine ions under an action of the radio frequency electric field, and the magnesium film on the surface of the two electrode plates chemically reacts with fluorine ions to form the magnesium fluoride film on the surface of the two electrode plates.
8. The surface treatment method of the electrode plate according to claim 1 , wherein after the step 2, the electrode plate comprises the magnesium-aluminum alloy material layer, the magnesium fluoride film, and a magnesium film sandwiched between and in contact with the magnesium-aluminum alloy material layer and the magnesium fluoride film.