Composition for preparing silicon carbide ingot and method for preparing silicon carbide ingot using the same
A method for preparing a SiC ingot includes loading a composition of a raw material comprising a carbon source and a silicon source into a reactor; placing a plurality of seed crystal on one side of the reactor spaced apart from the composition; and sublimating the composition such that the SiC ingot grows from the plurality of seed crystal. A flow factor of the composition may be 5 to 35.
1. A method for preparing a SiC ingot, comprising:
loading a powder composition of a raw material comprising SiC particles into a reactor;
placing a seed crystal on one side of the reactor spaced apart from the powder composition; and
sublimating the powder composition such that the SiC ingot grows from the seed crystal,
wherein a flow factor of the composition is 5 to 35,
wherein when the powder composition is compressed by applying a pressure of 8 kPa, a ratio of a change in an internal friction angle after the compression to an internal friction angle before the compression is 5% to 18%, and
wherein a number of a surface pit of the SiC ingot is 10 K/cm 2 or less.
2. The method of claim 1 , wherein a D 50 of the powder composition is 10 μm to 800 μm.
3. The method of claim 1 , wherein a caliber of the SiC ingot is 4 inches or more.
4. The method of claim 1 , wherein a caliber of the SiC ingot is 6 inches or more.
5. The method of claim 1 , wherein the SiC ingot comprises a 4H SiC single crystal.
6. The method of claim 1 , wherein the SiC ingot is convex or flat.
7. A powder composition of a raw material for preparing a SiC ingot with a surface pit of 10 K/cm 2 or less,
wherein the composition generates a flow when a predetermined pressure is applied,
wherein the powder composition comprises SiC particles,
wherein the powder composition has a flow factor of 5 to 35, and
wherein when the powder composition is compressed by applying a pressure of 8 kPa, a ratio of a change in an internal friction angle after the compression to an internal friction angle before the compression is 5% to 18%.