Method for forming a cavity and a component having a cavity
A method for forming a cavity in a silicon substrate, a surface of the silicon substrate having a tilting angle relative to a first plane of the silicon substrate, and the first plane being a {111} plane of the silicon substrate, and situation of an etching mask on the surface of the silicon substrate. The etching mask has a retarding structure that protrudes into the mask opening, and a first etching projection region. All further edges of the mask opening outside the first etching projection region are situated essentially parallel to {111} planes of the silicon substrate. The method includes an anisotropic etching of the silicon substrate during a defined etching duration. An etching rate in the <111> directions of the silicon substrate is lower than in other spatial directions, and the first retarding structure is undercut in a first undercut direction going out from the first etching projection region.
1. A component, comprising:
a silicon substrate that has a cavity, the cavity being on a surface of the silicon substrate and having a rectangular opening, a floor surface of the cavity being inclined by a tilting angle relative to the surface of the silicon substrate, the floor surface of the substrate being situated on a {111} plane of the silicon substrate, wherein the tilting angle is in a range between 1° and 40°,
wherein the silicon substrate has a through-opening that extends between the floor surface of the cavity and a rear side of the silicon substrate situated opposite the surface,
wherein the through-opening produces a gap in the floor surface of the cavity,
wherein the gap is situated approximately in a center of the floor surface,
wherein an edge surface formed from the floor surface is situated around the gap.