Magnetic device and manufacturing method of magnetic device
According to one embodiment, a magnetic device includes a magnetoresistive effect element including a first ferromagnet, a conductor, and an oxide provided between the first ferromagnet and the conductor, the oxide including a first oxide of a rare-earth element and a second oxide of an element of which a covalent radius is smaller than a covalent radius of the rare-earth element.
1. A magnetic device comprising a magnetoresistive effect element, the magnetoresistive effect element including:
a first ferromagnet;
a conductor;
an oxide provided between the first ferromagnet and the conductor, the oxide including a first oxide of a rare-earth element and a second oxide of an element of which a covalent radius is smaller than a covalent radius of the rare-earth element;
a second ferromagnet; and
a seed material provided between the first ferromagnet and the second ferromagnet,
wherein the first ferromagnet is sandwiched between the seed material and the oxide.
2. The device of claim 1 , wherein the rare-earth element in the first oxide includes at least one of scandium (Sc), yttrium (Y), lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), promethium (Pm), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), and lutetium (Lu).
3. The device of claim 2 , wherein the oxide further includes at least one of boron (B), phosphorus (P), carbon (C), aluminum (Al), silicon (Si), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), hafnium (Hf), and titanium (Ti).
4. The device of claim 1 , wherein the element in the second oxide includes at least one of sodium (Na), magnesium (Mg), aluminum (Al), silicon (Si), calcium (Ca), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), zinc (Zn), strontium (Sr), zirconium (Zr), niobium (Nb), hafnium (Hf), and tantalum (Ta).
5. The device of claim 4 , wherein the oxide further includes at least one of boron (B), phosphorus (P), carbon (C), aluminum (Al), silicon (Si), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), hafnium (Hf), and titanium (Ti).
6. The device of claim 1 , wherein the oxide forms a single layer containing the first oxide and the second oxide.
7. The device of claim 1 , wherein the oxide forms a first layer containing the first oxide and a second layer containing the second oxide.
8. The device of claim 7 , wherein the first layer is provided between the second layer and the first ferromagnet.
9. The device of claim 7 , wherein the second layer is provided between the first layer and the first ferromagnet.
10. The device of claim 1 , wherein the seed material includes at least one of magnesium oxide (MgO), aluminum oxide (AlO), zinc oxide (ZnO), titanium oxide (TiO), and LSMO (lanthanum-strontium-manganese oxide).
11. The device of claim 1 , wherein the conductor includes a non-magnetic material.
12. The device of claim 1 , wherein the conductor includes a ferromagnetic material.
13. The device of claim 1 , further comprising a memory cell that includes the magnetoresistive effect element.