Display device including concave/convex structure in the inorganic insulation layer
A display device includes a substrate, a circuit element layer on the substrate, a display element layer on the circuit element layer, a sealing film on the display element layer, an oxide film on the sealing film, a barrier metal layer on the oxide film, and a wiring layer on the barrier metal layer, wherein a surface of the sealing film in contact with the oxide film has concave/convexities, and the barrier metal layer is formed by titanium nitride. A height of the concave/convexities of the surface of the sealing film may be less than 30 nm. A thickness of the oxide film may be 5 nm or less.
1. A display device comprising:
a substrate having a pixel region and a periphery region arranged in an outer side of the pixel region;
a circuit element layer on the substrate;
a display element layer on the circuit element layer; and
a sealing film on the display element layer,
wherein
the sealing film includes a first inorganic insulation layer, a first organic insulation layer on the first inorganic insulation layer, a second inorganic insulation layer on the first organic insulation layer in the pixel region and extended to the periphery region, and a third inorganic insulation layer provided on the second inorganic insulation layer in the periphery region,
an oxide film is arranged on the third inorganic insulation layer,
a barrier metal layer is arranged on the oxide film,
a wiring layer is arranged on the barrier metal layer,
a top surface of the third inorganic insulation layer in contact with the oxide film has first concave/convexities in the periphery region,
the oxide film has second concave/convexities along the top surface of the third inorganic insulation layer,
the barrier metal layer includes titanium nitride,
the circuit element layer includes an interlayer insulation layer having a second organic insulation layer,
the second organic insulation layer is arranged in the pixel region and the periphery region, and has a first opening, a second opening and a patterned construction provided between the first opening and the second opening in the peripheral region,
the second inorganic insulation layer, the third inorganic insulation layer having the first concave/convexities and the oxide film having the second concave/convexities are arranged on the second organic insulation layer, and continuously cover the first opening, the patterned construction, and the second opening of the second organic insulation layer, in the periphery region, and
the barrier metal layer continuously covers the first opening, the patterned construction, and the second opening of the second organic insulation layer, and is provided along sidewalls of the first opening and the second opening.
2. The display device according to claim 1 , wherein a height of each of the first concave/convexities of the top surface of the third inorganic insulation layer is less than 30 nm.
3. The display device according to claim 1 , wherein a thickness of the oxide film is 5 nm or less.
4. The display device according to claim 1 , wherein the first and second concave/convexities are provided on a surface of the patterned construction between the first opening and the second opening.
5. A display device comprising:
a pixel part arranged with a plurality of pixels on a substrate;
a terminal part in a periphery region arranged in an outer side of the pixel part, the terminal part including a plurality of terminal electrodes;
a sealing layer covering the pixel part;
a detection electrode overlapping the pixel part and arranged on the sealing layer; and
a wiring arranged on the sealing layer and electrically connected to the detection electrode and the plurality of terminal electrodes,
wherein
the sealing layer includes a first inorganic insulation layer, a first organic insulation layer on the first inorganic insulation layer, a second inorganic insulation layer on the first organic insulation layer in the pixel region and extended to the periphery region, and a third inorganic insulation layer provided on the second inorganic insulation layer in the periphery region,
an oxide film is arranged on the third inorganic insulation layer,
a top surface of the third inorganic insulation layer in contact with the oxide film has a first concave/convex structures in the periphery region,
the oxide film has second concave/convex structures along the top surface of the third inorganic insulation layer,
the wiring is provided on the second concave/convex structures,
the circuit element layer includes an interlayer insulation layer having a second organic insulation layer,
the second organic insulation layer is arranged in the pixel part and the periphery region, and has a first opening, a second opening and a patterned construction provided between the first opening and the second opening in the pixel part,
the second inorganic insulation layer, the third inorganic insulation layer having the first concave/convex structures and the oxide film having the second concave/convex structures are arranged on the second organic insulation layer, and continuously cover the first opening, the patterned construction, and the second opening of the second organic insulation layer, in the periphery region, and
a barrier metal layer is part of the wiring and, is arranged on the oxide film and, continuously covers the first opening, the patterned construction, and the second opening of the second organic insulation layer, and is provided along sidewalls of the first opening and the second opening.
6. The display device according to claim 5 , wherein a height of each of the first concave/convex structures of the third inorganic insulation layer is less than 30 nm.
7. The display device according to claim 5 , wherein an organic interlayer insulating layer is included on the substrate across the pixel part and the terminal part, the organic interlayer insulating layer includes an opening part surrounding the pixel part, and the wiring is arranged intersecting the opening part.
8. The display device according to claim 5 , wherein the wiring includes at least one metal layer, and the barrier metal layer is provided between the oxide film and the metal layer.
9. The display device according to claim 8 , wherein the barrier metal layer is a titanium nitride film.
10. The display device according to claim 5 , wherein the detection electrode is arranged between the second inorganic insulation layer and the third inorganic insulation layer,
the wiring is arranged on the third inorganic insulation layer, and
the detection electrode and the wiring are electrically connected by a contact hole arranged in the third inorganic insulation layer.
11. The display device according to claim 5 , wherein the first and second concave/convex structures are provided on a surface of the patterned construction between the first opening and the second opening.