Acoustic wave device and manufacturing method for same
An acoustic wave device includes a piezoelectric substrate including an electrode formation surface, and an IDT electrode provided on the electrode formation surface. The IDT electrode includes a close contact layer located on the electrode formation surface, and a main electrode layer located on the close contact layer. The close contact layer includes first and second layers that respectively include first and second lateral surfaces. An area of a surface of the second layer that is in close contact with the main electrode layer is smaller than an area of a surface of the first layer that is in close contact with the piezoelectric substrate. An inclination angle of the second lateral surface is smaller than an inclination angle of the first lateral surface.
1. An acoustic wave device comprising:
a piezoelectric substrate including an electrode formation surface; and
an IDT electrode provided on the electrode formation surface of the piezoelectric substrate; wherein
the IDT electrode includes a close contact layer located on the electrode formation surface of the piezoelectric substrate, and a main electrode layer located on the close contact layer;
the close contact layer includes a first layer in close contact with the piezoelectric substrate, and a second layer in close contact with the main electrode layer;
the first layer includes a first lateral surface, and the second layer includes a second lateral surface;
at least portions of each of the first and second lateral surfaces are inclined relative to a normal direction of the electrode formation surface, and an area of a surface of the second layer that is in close contact with the main electrode layer is smaller than an area of a surface of the first layer that is in close contact with the piezoelectric substrate; and
angles defined by the inclined portions of each of the first and second lateral surfaces with respect to the normal direction of the electrode formation surface are inclination angles of each of the first and second lateral surfaces, and the inclination angle of the second lateral surface is smaller than the inclination angle of the first lateral surface.
2. The acoustic wave device according to claim 1 , wherein the main electrode layer includes a lateral surface, an angle defined by the lateral surface of the main electrode layer with respect to the normal direction of the electrode formation surface of the piezoelectric substrate is an inclination angle of the lateral surface of the main electrode layer, and the inclination angle of the lateral surface of the main electrode layer is equal to or smaller than the inclination angle of the second lateral surface.
3. The acoustic wave device according to claim 1 , wherein an elastic modulus of a metal of the close contact layer is larger than an elastic modulus of a metal of the main electrode layer.
4. The acoustic wave device according to claim 1 , wherein a melting point of a metal of the close contact layer is equal to or higher than a melting point of a metal of the main electrode layer.
5. The acoustic wave device according to claim 1 , wherein the close contact layer includes Ti, and the main electrode layer includes Al.
6. The acoustic wave device according to claim 1 , wherein the acoustic wave device has a structure such that an acoustic wave is excited in response to an alternating current voltage being applied to the IDT electrode.
7. The acoustic wave device according to claim 6 , wherein
at least one reflector is provided on the electrode formation surface of the piezoelectric substrate; and
the at least one reflector is located at a side of the IDT electrode in a propagation direction of the acoustic wave.
8. The acoustic wave device according to claim 1 , wherein a thickness of the main electrode layer is greater than a thickness of the close contact layer.
9. The acoustic wave device according to claim 1 , wherein the main electrode layer includes an alloy of Al and Cu.
10. The acoustic wave device according to claim 1 , wherein:
the IDT electrode includes a plurality of electrode fingers; and
a width of each of the plurality of electrode fingers is narrowed in a direction away from the electrode formation surface, along a lamination direction of the IDT electrode.
11. An acoustic wave device comprising:
a piezoelectric substrate including an electrode formation surface; and
an IDT electrode provided on the electrode formation surface of the piezoelectric substrate; wherein
the IDT electrode includes a close contact layer located on the electrode formation surface of the piezoelectric substrate, an intermediate layer located on the close contact layer, and a main electrode layer located on the intermediate layer;
each of the close contact layer and the intermediate layer includes a lateral surface;
at least a portion of the lateral surface of the close contact layer is inclined relative to a normal direction of the electrode formation surface, and an area of a surface of the close contact layer that is in close contact with the intermediate layer is smaller than an area of a surface of the close contact layer that is in close contact with the piezoelectric substrate, and at least a portion of the lateral surface of the intermediate layer is inclined relative to the normal direction of the electrode formation surface, and an area of a surface of the intermediate layer that is in close contact with the main electrode layer is smaller than an area of a surface of the intermediate layer that is in close contact with the close contact layer; and
an angle defined by the inclined portion of the lateral surface of the close contact layer and an angle defined by the inclined portion of the lateral surface of the intermediate layer with respect to the normal direction of the electrode formation surface are an inclination angle of the lateral surface of the close contact layer and an inclination angle of the lateral surface of the intermediate layer, respectively, and the inclination angle of the lateral surface of the intermediate layer is smaller than the inclination angle of the lateral surface of the close contact layer.
12. The acoustic wave device according to claim 11 , wherein the main electrode layer includes a lateral surface, an angle defined by the lateral surface of the main electrode layer with respect to the normal direction of the electrode formation surface is an inclination angle of the lateral surface of the main electrode layer, and the inclination angle of the lateral surface of the main electrode layer is equal to or smaller than the inclination angle of the lateral surface of the intermediate layer.
13. The acoustic wave device according to claim 11 , wherein an elastic modulus of a metal of the close contact layer is equal to or larger than an elastic modulus of a metal of the intermediate layer, and the elastic modulus of the metal of the intermediate layer is larger than an elastic modulus of a metal of the main electrode layer.
14. The acoustic wave device according to claim 11 , wherein a melting point of a metal of the close contact layer is equal to or higher than a melting point of a metal of the intermediate layer, and the melting point of the metal of the intermediate layer is equal to or higher than a melting point of a metal of the main electrode layer.
15. The acoustic wave device according to claim 11 , wherein the close contact layer includes one of NiCr and Ti, the intermediate layer includes Ti, and the main electrode layer includes Al.