Conditioning chamber component

1. An apparatus for conditioning a component of a processing chamber, comprising:

a tank for holding a megasonic conditioning solution;

a mount for holding the component immersed in a megasonic conditioning solution, when the tank is filled with the megasonic conditioning solution;

a megasonic conditioning solution inlet system for delivering the megasonic conditioning solution to the tank, wherein at least part of the megasonic conditioning solution inlet is under where the component is held in the megasonic conditioning solution;

a megasonic transducer head, comprising:

at least one megasonic transducer; and

housing positioned between the at least one megasonic transducer and the megasonic conditioning solution, where the megasonic transducer head has a length and wherein the at least one megasonic transducer provides megasonic energy to the megasonic conditioning solution through the housing, wherein the megasonic energy is delivered to the component via the megasonic conditioning solution, and wherein the housing encloses the at least one megasonic transducer;

a megasonic conditioning solution drain system for draining the megasonic conditioning solution from the tank at a location above where the component is held in the megasonic conditioning solution;

an actuator for moving the megasonic transducer head across the tank above where the component is held in the megasonic conditioning solution, wherein the actuator is on a first side of the tank;

a support track on a second side of the tank opposite from the first side of the tank;

a ball in contact with the support track; and

a socket housing in contact with the ball, wherein a first end of the length of the megasonic transducer head is connected to the actuator and a second end of the length of the megasonic transducer head is connected to the socket housing.

2. The apparatus, as recited in claim 1 , further comprising:

a pump for circulating the megasonic conditioning solution;

a degas membrane; and

at least one filter for filtering contaminants from the megasonic conditioning solution, wherein the pump, degas membrane, and at least one filter are in serial fluid connection between the megasonic conditioning solution drain system and the megasonic conditioning solution inlet system.

3. The apparatus, as recited in claim 2 , further comprising a heater for heating the megasonic conditioning solution in serial fluid connection with the pump.

4. The apparatus, as recited in claim 1 , wherein the megasonic conditioning solution drain system comprises:

a spillway configured to allow the megasonic conditioning solution to flow from the tank; and

a gutter for catching the megasonic conditioning solution flowing from the spillway.

5. The apparatus, as recited in claim 4 , wherein the spillway is formed by a weir.

6. The apparatus, as recited in claim 1 , wherein megasonic conditioning solution inlet system comprises at least one inlet for flowing the megasonic conditioning solution into the tank at a location under where the component is mounted in the tank.

7. The apparatus, as recited in claim 1 , wherein the tank comprises nonmetallic sides.

8. The apparatus, as recited in claim 1 , wherein the actuator moves the megasonic transducer head in a direction substantially perpendicular to the length of the megasonic transducer head.

9. The apparatus, as recited in claim 1 , wherein the housing comprises a quartz housing positioned between the at least one megasonic transducer and the megasonic conditioning solution.

10. The apparatus, as recited in claim 1 , further comprising at least one generator, wherein the at least one generator provides enough power to the megasonic transducer head, so that the megasonic transducer head provides at least 2 Watts/cm 2 of power to the megasonic conditioning solution.

11. The apparatus, as recited in claim 1 , wherein the length of the megasonic transducer head spans across a dimension of the tank.