Semiconductor device with integrated memory devices and MOS devices and process of making the same
A method of integrating memory and metal-oxide-semiconductor (MOS) processes is provided, including steps of forming an oxide layer and a nitride layer on a substrate, forming a field oxide in a first area by an oxidation process with the nitride layer as a mask, wherein the oxidation process simultaneously forms a top oxide layer on the nitride layer, removing the top oxide layer, the nitride layer and the oxide layer in the first area, forming a polysilicon layer on the substrate, and patterning the polysilicon layer into MOS units in the first area and memory units in a second area.
1. A method of integrating memory and metal-oxide-semiconductor (MOS) processes, comprising:
providing a substrate with a first area and a second area;
forming an oxide layer on said substrate and a nitride layer on said oxide layer in said first area and said second area;
patterning said oxide layer and said nitride layer to form a predetermined region on said substrate in said first area;
forming a field oxide in said predetermined region by an oxidation process with said nitride layer as a mask, wherein said oxidation process simultaneously forms a top oxide layer on said nitride layer;
removing said top oxide layer, said nitride layer and said oxide layer in said first area;
forming a gate dielectric layer on said substrate in said first area after said top oxide layer, said nitride layer and said oxide layer are removed;
forming a polysilicon layer on said substrate after said gate dielectric layer is formed; and
patterning said polysilicon layer into MOS units in said first area and memory units in said second area.
2. The method of integrating memory and metal-oxide-semiconductor (MOS) processes of claim 1 , wherein forming said field oxide in said first area comprises:
forming a first photoresist on said nitride layer;
performing a first etch process with said first photoresist as an etch mask to remove said oxide layer and said nitride layer in said predetermined region for said field oxide in said first area;
removing said first photoresist; and
performing said oxidation process to simultaneously form said field oxide on said predetermined region in said first area and said top oxide layer on said nitride layer.
3. The method of integrating memory and metal-oxide-semiconductor (MOS) processes of claim 1 , wherein removing said top oxide layer, said nitride layer and said oxide layer in said first area comprises:
forming a second photoresist on said second area; and
performing a second etch process with said second photoresist as an etch mask to remove said top oxide layer, said nitride layer and said oxide layer in said first area; and
removing said second photoresist.
4. The method of integrating memory and metal-oxide-semiconductor (MOS) processes of claim 1 , wherein said oxidation process is local oxidation of silicon (LOCOS) process.
5. The method of integrating memory and metal-oxide-semiconductor (MOS) processes of claim 1 , wherein said MOS units in said second area comprise complementary metal-oxide-semiconductor (CMOS) devices and double-diffused metal-oxide-semiconductor (DMOS) devices.
6. The method of integrating memory and metal-oxide-semiconductor (MOS) processes of claim 5 , wherein said gate dielectric layers of said CMOS device and said DMOS device are different and are formed in different processes.
7. The method of integrating memory and metal-oxide-semiconductor (MOS) processes of claim 1 , wherein said memory unit is silicon-oxide-nitride-oxide-silicon (SONOS) memory.