Interchangeable magnet pack
An apparatus includes a target, wherein the target includes a nonuniform erosion profile. The apparatus also includes a number of interchangeable magnetic and non-magnetic inserts. The interchangeable magnetic and non-magnetic inserts are configured to control a pass through flux based on the nonuniform erosion profile.
1. A method comprising:
determining a nonuniform erosion profile for a target;
as the target erodes, adjusting magnetic flux at a surface of the target based on the nonuniform erosion profile to prevent alteration to a sputter profile of the target and maintain ongoing erosion of the target consistent with the nonuniform erosion profile, the adjusted magnetic flux at the surface of the target having a radially nonuniform profile with variations that correspond to variations in the nonuniform erosion profile; and
directing a plasma at the target to cause material of the target to sputter onto an adjacent substrate, the plasma being steered by the adjusted magnetic flux.
2. The method of claim 1 , wherein the nonuniform erosion profile is a target erosion profile designed to sputter more material from an outer diameter region of the target than a center of the target.
3. The method of claim 1 , wherein adjusting the magnetic flux at the surface of the target is effective to increase uniformity of a magnetic field profile at a front side of the target.
4. The method of claim 1 , wherein adjusting the magnetic flux at the surface of the target further comprises repositioning a plurality of magnetic and non-magnetic inserts within a magnet pack.
5. The method of claim 1 , wherein adjusting the magnetic flux at the surface of the target includes reducing a pass-through flux in an outer diameter region of the target while maintaining or increasing a pass-through flux in an inner diameter region of the target.
6. The method of claim 1 , wherein adjusting the magnetic flux at the surface of the target includes reducing a pass-through flux of the target in an area of greater target erosion while maintaining or increasing a pass-through flux of the target in an area of lesser target erosion.
7. The method of claim 1 , wherein adjusting the magnetic flux at the surface of the target includes removing one or more magnetic inserts from a magnet pack.
8. The method of claim 7 , wherein the magnet pack includes a plurality of cells each configured to store one or more of the plurality of magnetic and non-magnetic inserts.
9. A sputtering system, comprising:
a programmable magnet pack adapted to:
generate a magnetic flux that steers a plasma to sputter material from a surface of a target, the magnetic flux at the surface of the target having a radially nonuniform flux profile with variations corresponding to variations in a nonuniform erosion profile of the target; and
as the target erodes, adjust the magnetic flux at the surface of the target to prevent alteration to a sputter profile of the target and to maintain ongoing erosion of the target consistent with the nonuniform erosion profile.
10. The sputtering system of claim 9 , wherein the programmable magnet pack includes a plurality of cells and a plurality of magnetic inserts positioned within the plurality of cells.
11. The sputtering system of claim 9 , wherein the nonuniform erosion profile is a target erosion profile designed to sputter more material from an outer diameter region of the target than a center of the target.
12. The sputtering system of claim 9 , wherein the radially nonuniform flux profile causes a pass-through flux to be reduced in an outer diameter region of the target as compared to an inner diameter region of the target.
13. The sputtering system of claim 9 , wherein the radially nonuniform flux profile causes a pass-through flux of the target to be reduced in an area of greater target erosion as compared to a pass-through flux of the target in an area of lesser target erosion.
14. The sputtering system of claim 10 , wherein the plurality of magnetic inserts are adapted to be selectively removed from the plurality of cells.
15. The sputtering system of claim 10 , wherein the plurality of magnetic inserts include at least one material selected from a group of materials comprising Neodymium, Samarium Cobalt, Ceramic, Alnico, Stainless Steel, and Steel.
16. A sputtering system, comprising:
a target; and
a programmable magnet pack including a plurality of magnetic and non-magnetic removable inserts adjustably positioned to generate a magnetic flux that steers a plasma to sputter material from a surface of the target according to nonuniform erosion profile, the programmable magnet pack adapted to:
generate magnetic flux at the surface of the target having a radially nonuniform flux profile with variations corresponding to variations in the nonuniform erosion profile of the target; and
as the target erodes, adjust the magnetic flux at the surface of the target to prevent alteration to a sputter profile of the target and to maintain ongoing erosion of the target consistent with the nonuniform erosion profile.
17. The sputtering system of claim 16 , wherein the nonuniform erosion profile is a target erosion profile designed to sputter more material from an outer diameter region of the target than a center of the target.
18. The sputtering system of claim 17 , wherein the radially nonuniform flux profile causes a pass-through flux to be reduced in an outer diameter region of the target as compared to an inner diameter region of the target.
19. The sputtering system of claim 16 , wherein the magnet pack includes a plurality of cells and the plurality of magnetic and non-magnetic removable inserts are adapted to be removably inserted within the plurality of cells.
20. The sputtering system of claim 16 , wherein the plurality of magnetic and non-magnetic removable inserts includes at least one material selected from a group of materials comprising Neodymium, Samarium Cobalt, Ceramic, Alnico, Stainless Steel, and Steel.