Nonvolatile semiconductor devices including non-circular shaped channel patterns and methods of manufacturing the same
A non-volatile memory structure can include a substrate extending horizontally and a filling insulating pattern extending vertically from the substrate. A plurality of active channel patterns can extend vertically from the substrate in a zig-zag pattern around a perimeter of the filling insulating pattern, where each of the active channel patterns having a respective non-circular shaped horizontal cross-section. A vertical stack of a plurality of gate lines can each extend horizontally around the filling insulating pattern and the plurality of active channel patterns.
1. A vertical NAND non-volatile memory structure comprising:
a substrate extending horizontally;
a gate electrode extending horizontally;
a vertical block provided in an opening of the vertical NAND non-volatile memory structure, the vertical block penetrating the gate electrode and including a filling insulating pattern and a channel pattern, wherein the opening includes a linear region extending in a first horizontal direction D 1 and extending regions extending in a second horizontal direction D 2 , and the second horizontal direction D 2 is perpendicular to the first horizontal direction D 1 ; and
wherein the channel pattern extends vertically from the substrate, and
wherein the channel pattern is disposed in the extending regions opening and has a non-circular shape extending in the second horizontal direction D 2 in a plan view of the channel pattern.
2. The vertical NAND non-volatile memory structure of claim 1 wherein the channel pattern includes a curved side wall as part of the non-circular shape.
3. The vertical NAND non-volatile memory structure of claim 2 wherein the channel pattern further includes a linear side wall opposite the curved side wall.
4. The vertical NAND non-volatile memory structure of claim 3 , wherein the curved side wall extends in an arc exceeding 180 degrees in the plan view.
5. The vertical NAND non-volatile memory structure of claim 3 , wherein the curved side wall extends in an arc less than 180 degrees in the plan view.
6. The vertical NAND non-volatile memory structure of claim 3 wherein the channel pattern has a semi-circular shape in the plan view.
7. The vertical NAND non-volatile memory structure of claim 2 wherein the curved side wall comprises a first curved side wall, the channel pattern further includes a second curved side wall opposite the first curved side wall.
8. The vertical NAND non-volatile memory structure of claim 7 wherein the first and second curved side walls are curved differently in the same direction.
9. The vertical NAND non-volatile memory structure of claim 7 wherein the first and second curved side walls are curved differently in opposite directions.
10. The vertical NAND non-volatile memory structure of claim 5 further comprising:
an additional linear portion of the channel pattern spacing the curved side wall apart from the linear side wall.
11. The vertical NAND non-volatile memory structure of claim 2 wherein the channel pattern has a semi-annular shape including a curved inner side wall opposite the curved side wall.
12. The vertical NAND non-volatile memory structure of claim 1 , wherein the vertical NAND non-volatile memory structure is characterized by layers of approximately uniform thickness.
13. A vertical NAND non-volatile memory structure comprising:
a substrate extending horizontally;
gate electrodes extending horizontally on the substrate;
a vertical block penetrating the gate electrodes and including a filling insulating pattern and channel patterns having non-circular shapes,
wherein the filling insulating pattern extends in a first horizontal direction,
wherein the channel patterns contact side surfaces of the filling insulating pattern and protrude from the side surfaces of the filling insulating pattern in a second horizontal direction perpendicular to the first horizontal direction.
14. The vertical NAND non-volatile memory structure of claim 13 further comprises a data storage layer between the gate electrodes and the channel patterns,
wherein the data storage layer covers a first side surface of each of the channel patterns,
wherein the filling insulating pattern covers a second side surface of each of the channel patterns.
15. The vertical NAND non-volatile memory structure of claim 14 wherein the second side surface of each of the channel patterns contacts the filling insulating pattern.
16. The vertical NAND non-volatile memory structure of claim 13 wherein the channel patterns include a first channel pattern and a second channel pattern spaced apart from the first channel pattern with the filling insulating pattern therebetween,
the gate electrodes do not extend between the first channel pattern and the second channel pattern.
17. The vertical NAND non-volatile memory structure of claim 16 wherein the vertical block further comprises a lower semiconductor pattern between the substrate and the filling insulating pattern,
wherein the first and the second channel patterns are connected in common to the lower semiconductor pattern.
18. The vertical NAND non-volatile memory structure of claim 17 wherein the lower semiconductor pattern contacts a bottom surface of the filling insulating pattern and the bottom surfaces of the first and a second channel pattern.