Silicon nitride layer etching composition
Provided is a silicon nitride layer etching composition, and more specifically, a silicon nitride layer etching composition including two different silicon-based compounds in an etching composition to be capable of selectively etching a silicon nitride layer relative to a silicon oxide layer with a remarkable etch selectivity ratio and providing remarkable effects of suppressing generation of precipitates and reducing the abnormal growth of other layers existing in the vicinity, including the silicon oxide layer when the silicon nitride layer etching composition is used for an etching process and a semiconductor manufacturing process.
1. A silicon nitride layer etching composition comprising:
a phosphoric acid, a first silicon-based compound represented by Chemical Formula 1 below, a second silicon-based compound represented by Chemical Formula 2 below, a fluorine-based compound and water:
wherein R 1 to R 6 are each independently selected from the group consisting of hydrogen, a halogen, hydroxy, (C1-C10)alkoxy, (C1-C10)alkyl, and (C2-C10)alkenyl;
wherein R′ is amino(C1-C10)alkyl, wherein —CH 2 — of the amino(C1-C10)alkyl is optionally substituted with —N(R 11 )— or —O—, wherein R 11 is hydrogen, (C1-C10)alkyl, or amino(C1-C10)alkyl;
wherein R″ is selected from the group consisting of —L 1 —SO 3 H, —L 2 —OP(═O)(OH) 2 , —L 3 —P(═O)(OR 12 )(OR 13 ), —L 4 —OP(═O)(OH)(R 14 ), —L 5 —P(═O)(OR 15 )R 16 , and a salt thereof, wherein L 1 to L 5 are each independently (C1-C10)alkylene or (C3-C10)cycloalkylene, and R 12 to R 16 are each independently hydrogen or (C1-C10)alkyl; and
wherein the R′ and R″ are unsubstituted or substituted with one or more selected from the group consisting of halogen, hydroxy, cyano, nitro, (C1-C10)alkyl, (C1-C10)alkoxy, (C3-C10) cycloalkyl, (C3-C10)heterocycloalkyl, (C3-C12)heteroaryl, and (C6-C12)aryl, wherein the heterocycloalkyl or the heteroaryl includes one or more selected from the group consisting of B, N, O, S, P(═O), Si, and P.
2. The silicon nitride layer etching composition of claim 1 , wherein a molar ratio of the first silicon-based compound and the second silicon-based compound is 1:0.01 to 1:1.
3. The silicon nitride layer etching composition of claim 1 , wherein the silicon nitride layer etching composition includes the first silicon-based compound and the second silicon-based compound in a weight ratio of 1:1 to 100:1.
4. The silicon nitride layer etching composition of claim 1 , wherein an etch rate with respect to a silicon nitride layer of the silicon nitride layer etching composition is 100 to 300 Å/min, and an etch rate with respect to a silicon oxide layer of the silicon nitride layer etching composition is 0 to 0.2 Å/min.
5. The silicon nitride layer etching composition of claim 1 , wherein a silicon nitride layer / silicon oxide layer etch selectivity ratio of the silicon nitride layer etching composition is 500 or more.
6. The silicon nitride layer etching composition of claim 1 , wherein an etch rate drift of a silicon nitride layer after repeating an etching process satisfies Relational Expression 1 below:
ΔERD SiNx ≤1% [Relational Expression 1]
in Relational Expression 1,
wherein ΔERD SiNx is an etch rate drift relative to an initial etch rate with respect to the silicon nitride layer.
7. A method of selectively etching a silicon nitride layer relative to a silicon oxide layer using the silicon nitride layer etching composition of claim 1 .
8. A method of manufacturing a semiconductor device comprising:
selectively etching a silicon nitride layer relative to a silicon oxide layer using the silicon nitride layer etching composition of claim 1 .