Magnetic sensor device and current sensor
A current sensor includes a magnetic sensor device. The magnetic sensor device includes a magnetic sensor, a first magnetic layer, and a second magnetic layer in non-contact with the first magnetic layer. The magnetic sensor, the first magnetic layer, and the second magnetic layer are disposed across a virtual straight line and arranged in this order in a direction parallel to the virtual straight line. Different portions of magnetic flux generated by a current to be detected pass through the magnetic sensor, the first magnetic layer, and the second magnetic layer.
1. A magnetic sensor device for use in a current sensor for detecting a value of a current to be detected, comprising:
a magnetic sensor;
a first magnetic layer;
a second magnetic layer in non-contact with the first magnetic layer;
a nonmagnetic layer between the first magnetic layer and the second magnetic layer; and
a substrate, wherein
the magnetic sensor, the first magnetic layer, and the second magnetic layer are arranged (1) in an order of the magnetic sensor, the first magnetic layer and the second magnetic layer, (2) such that a straight line passes through the magnetic sensor, the first magnetic layer and the second magnetic layer and (3) so that different portions of magnetic flux generated by the current to be detected pass through the magnetic sensor, the first magnetic layer, and the second magnetic layer,
the magnetic sensor, the first magnetic layer, and the second magnetic layer are fixed on the substrate,
the nonmagnetic layer is a conductor and is in contact with the second magnetic layer, and
a gap between the first magnetic layer and the second magnetic layer in a direction of the straight line is between 0.1 and 10 μm.
2. The magnetic sensor device according to claim 1 , wherein the magnetic sensor includes a magnetoresistive element.
3. The magnetic sensor device according to claim 1 , wherein the magnetic sensor is configured to detect a magnetic field in a second direction orthogonal to the straight line.
4. The magnetic sensor device according to claim 3 , wherein each of the first magnetic layer and the second magnetic layer has a first dimension in the direction of the straight line, and a second dimension in the second direction, the second dimension being greater than the first dimension.
5. The magnetic sensor device according to claim 4 , wherein the first magnetic layer is smaller in the second dimension than the second magnetic layer.
6. The magnetic sensor device according to claim 4 , wherein the first magnetic layer is smaller in volume than the second magnetic layer.
7. The magnetic sensor device according to claim 6 , wherein the first magnetic layer is smaller in at least one of the first and second dimensions than the second magnetic layer.
8. The magnetic sensor device according to claim 3 , wherein each of the first magnetic layer and the second magnetic layer has a first dimension in the direction of the straight line, a second dimension in the second direction, and a third dimension in a third direction orthogonal to the direction of the straight line and the second direction, the third dimension being greater than the second dimension.
9. The magnetic sensor device according to claim 8 , wherein the third dimension of the first magnetic layer is smaller than or equal to the third dimension of the second magnetic layer.
10. The magnetic sensor device according to claim 1 , wherein the first magnetic layer is lower in coercivity than the second magnetic layer.
11. The magnetic sensor device according to claim 1 , wherein the magnetic sensor, the first magnetic layer, and the second magnetic layer are integrated with each other and independent of a conductor through which the current to be detected flows.
12. A current sensor comprising:
a coil for generating a second magnetic field for canceling out a first magnetic field generated by a current to be detected;
a magnetic sensor for detecting a composite magnetic field of the first and second magnetic fields as a magnetic field to be detected, and generating a magnetic-field detection value dependent on a strength of the magnetic field to be detected;
a feedback circuit for controlling, in accordance with the magnetic-field detection value, a feedback current to be used to generate the second magnetic field, and passing the feedback current through the coil;
a current detector for generating a detection value of the feedback current;
a first magnetic layer;
a second magnetic layer in non-contact with the first magnetic layer;
a nonmagnetic layer between the first magnetic layer and the second magnetic layer; and
a substrate, wherein
the magnetic sensor, the first magnetic layer, and the second magnetic layer are arranged (1) in an order of the magnetic sensor, the first magnetic layer and the second magnetic layer, (2) such that a straight line passes through the magnetic sensor, the first magnetic layer and the second magnetic layer and (3) so that different portions of magnetic flux generated by the current to be detected pass through the magnetic sensor, the first magnetic layer, and the second magnetic layer,
the coil, the magnetic sensor, the first magnetic layer and the second magnetic layer are fixed on the substrate,
the nonmagnetic layer is a conductor and is in contact with the second magnetic layer, and
a gap between the first magnetic layer and the second magnetic layer in a direction of the straight line is between 0.1 and 10 μm.
13. The current sensor according to claim 12 , wherein the magnetic sensor includes a magnetoresistive element.
14. The current sensor according to claim 12 , wherein the magnetic sensor is configured to detect a magnetic field in a second direction orthogonal to the straight line.
15. The current sensor according to claim 14 , wherein each of the first magnetic layer and the second magnetic layer has a first dimension in the direction of the straight line, and a second dimension in the second direction, the second dimension being greater than the first dimension.
16. The current sensor according to claim 15 , wherein the first magnetic layer is smaller in the second dimension than the second magnetic layer.
17. The current sensor according to claim 15 , wherein the first magnetic layer is smaller in volume than the second magnetic layer.
18. The current sensor according to claim 17 , wherein the first magnetic layer is smaller in at least one of the first and second dimensions than the second magnetic layer.
19. The current sensor according to claim 14 , wherein each of the first magnetic layer and the second magnetic layer has a first dimension in the direction of the straight line, a second dimension in the second direction, and a third dimension in a third direction orthogonal to the direction of the straight line and the second direction, the third dimension being greater than the second dimension.
20. The current sensor according to claim 19 , wherein the third dimension of the first magnetic layer is smaller than or equal to the third dimension of the second magnetic layer.
21. The current sensor according to claim 12 , wherein the first magnetic layer is lower in coercivity than the second magnetic layer.
22. The current sensor according to claim 12 , wherein the coil is located on an opposite side of the first magnetic layer from the second magnetic layer.
23. The current sensor according to claim 12 , wherein the coil, the magnetic sensor, the first magnetic layer, and the second magnetic layer are integrated with each other and independent of a conductor through which the current to be detected flows.