Generalized organic vapor jet depositor capable of high resolution printing and method for OVJP printing
OVJP depositors and techniques for using the same are provided, in which the in-substrate plane velocity of the delivery and confinement flows are both nonzero and parallel to each other across the boundary between the two. These configurations provide improved material utilization efficiency and relaxed fly height tolerances, while achieving acceptable printing resolution and feature uniformity.
1. An organic vapor jet printing (OVJP) depositor, comprising:
a print head configured to move along a first direction of motion relative to a substrate disposed below the print head, the print head further comprising:
a delivery aperture in fluid communication with a source of organic material to be deposited on a substrate and a carrier gas;
a first exhaust aperture disposed ahead of and aligned with the delivery aperture along the first direction of motion;
a second exhaust aperture disposed behind and aligned with the delivery aperture along the first direction of motion;
a first confinement gas aperture disposed laterally adjacent to the delivery aperture relative to the first direction of motion; and
a second confinement gas aperture disposed laterally adjacent to the delivery aperture and opposite the first confinement gas aperture relative to the first confinement gas aperture.
2. The depositor of claim 1 , wherein the delivery aperture, the first and second exhaust apertures, and the first and second confinement gas apertures are arranged on a surface of the depositor such that, when the depositor is operated to deposit organic material on a substrate, a first flow of material from the delivery aperture to at least one of the first and second exhaust apertures is parallel to a second flow of material from at least one of the first and second confinement gas apertures.
3. The depositor of claim 1 , wherein a dimension of the delivery aperture parallel to a direction of relative motion of the depositor and a substrate when the depositor is operated to deposit material on the substrate is shorter than a distance between an edge of the delivery aperture closest to the second exhaust aperture and an edge of the second exhaust aperture farthest from the delivery aperture.
4. The depositor of claim 1 , wherein the first exhaust aperture has a width that is less than a width of a feature to be printed on a substrate when the depositor is operated to deposit material on the substrate.
5. The depositor of claim 1 , wherein the first exhaust aperture has a width of not more than 50 μm.
6. The depositor of claim 1 , wherein the first exhaust aperture and the second exhaust aperture are oval or circular.
7. The depositor of claim 1 , wherein the first exhaust aperture and the second exhaust aperture are rectangular.
8. The depositor of claim 7 , wherein the first and second confinement gas apertures are rectangular.
9. The depositor of claim 7 , wherein the delivery aperture is rectangular.
10. The depositor of claim 1 , wherein the delivery aperture has chamfered side walls.
11. The depositor of claim 10 , wherein the first and second confinement apertures have chamfered side walls.
12. The depositor of claim 1 , wherein the delivery-to-exhaust spacing DE of the depositor is not more than 400 μm.
13. The depositor of claim 1 , wherein the delivery-to-confinement spacing DC of the depositor is not more than 130 μm.
14. The depositor of claim 1 , wherein the width of the first and second exhaust apertures is greater than the width of the delivery aperture.
15. The depositor of claim 1 , wherein, when operated to deposit material on a substrate, the molar flow of inert gas through the first and second exhaust apertures in total is greater than the molar flow of inert gas through the delivery aperture.
16. The depositor of claim 1 , wherein each of the first and second exhaust apertures has a maximum width of not more than 500 μm.
17. The depositor of claim 16 , wherein each of the first and second exhaust apertures has a maximum width in the range of 100-500 μm.
18. An OVJP nozzle block comprising a plurality of depositors as recited in claim 1 arranged in a linear array.