Solid-state image sensor and method of manufacturing the same

1. A solid-state image sensor, comprising:

a semiconductor substrate having a plurality of photoelectric conversion elements being two-dimensionally formed therein;

a color filter layer formed on the semiconductor substrate and having color filters of a plurality of colors being two-dimensionally formed therein in a pattern such that the color filters correspond respectively to the photoelectric conversion elements,

wherein the color filter layer satisfies formulas (1) and (2):

200 nm≤ A ≤700 nm  (1)

C≤A+ 200 nm  (2)

where A represents a thickness in nm of a first-color color filter of a first color among the plurality of colors, C represents a thickness in nm of color filters of colors other than the first color, and A and C are different values; and

a lower layer flattening layer positioned directly on the semiconductor substrate and formed between the first-color color filter of the first color and the semiconductor substrate, and not between the color filters of the colors other than the first color and the semiconductor substrate.

2. The solid-state image sensor according to claim 1 ,

wherein the lower layer flattening layer has a thickness B in nm which satisfies formulas (3) and (4):

0≤ B≤ 200 nm  (3)

C≤A+B+ 200 nm  (4).

3. The solid-state image sensor according to claim wherein the color filter layer and the lower layer flattening layer satisfy formula (5):

A+B− 200 [nm]≤ C≤A+B+ 200 [nm]  (5)

4. A method of manufacturing the solid-state image sensor according to claim 3 , comprising:

forming the lower layer flattening layer on the semiconductor substrate;

applying a coating liquid for the first-color color filter onto the lower layer flattening layer;

curing the coating liquid such that the color filter layer is formed on the lower layer flattening layer;

removing, by dry etching, a portion of the color filter layer other than a portion where the first-color color filter is to be formed, and a portion of the lower layer flattening layer below the portion of the color filter layer to be removed, such that the first-color color filter is formed; and

forming the color filters of the colors other than the first color by dry etching.

5. The method according to claim 4 , wherein the curing is conducted at a heating temperature of 230° C.-270° C.

6. The solid-state image sensor according to claim 2 , wherein the color filter layer and the lower layer flattening layer satisfy formulas (6) and (7):

0< B≤ 200 nm  (6)

A<C≤A+B+ 200 nm  (7).

7. The solid-state image sensor according to claim 6 , wherein the first color is green,

the colors other than the first color include red, and

a thickness C of a red color filter is larger than a thickness (A+B).

8. A method of manufacturing the solid-state image sensor of claim 2 , comprising:

forming the lower layer flattening layer on the semiconductor substrate;

applying a coating liquid for the first-color color filter onto the lower layer flattening layer;

curing the coating liquid such that the color filter layer is formed on the lower layer flattening layer;

removing, by dry etching, a portion of the color filter layer other than a portion where the first-color color filter is to be formed, and a portion of the lower layer flattening layer below the portion of the color filter layer to be removed, such that the first-color color filter is formed; and

forming the color filters of the colors other than the first color by photolithography.

9. The method according to claim 8 , wherein the curing is conducted at a heating temperature of 230° C.-270° C.

10. The solid-state image sensor according to claim 1 , wherein the first-color color filter includes a thermosetting resin and a photocurable resin, and

the first-color color filter includes the thermosetting resin at a higher content than the photocurable resin.

11. The solid-state image sensor according to claim 1 , wherein the first-color color filter includes a pigment at 50% by mass or more.

12. The solid-state image sensor according to claim 1 , further comprising:

a plurality of microlenses formed two-dimensionally on the color filter layer such that the microlenses correspond respectively to the photoelectric conversion elements,

wherein each of the microlenses has a height from a lens top to a lens bottom of 400 nm-800 nm.

13. The solid-state image sensor according to claim 1 , wherein, the first-color color filter occupies a largest area among the color filters.

14. A method of manufacturing a solid-state image sensor, the solid-state image sensor comprising:

a semiconductor substrate having a plurality of photoelectric conversion elements being two-dimensionally formed therein;

a color filter layer formed on the semiconductor substrate and having color filters of a plurality of colors being two-dimensionally formed therein in a pattern such that the color filters correspond respectively to the photoelectric conversion elements; and

a lower layer flattening layer positioned directly on the semiconductor substrate and formed between a first-color color filter of a first color among the plurality of colors and the semiconductor substrate, and not between color filters of colors other than the first color and the semiconductor substrate,

wherein the color filter layer satisfies formulas (1) and (2):

200 nm≤ A≤ 700 nm  (1)

C≤A+ 200 nm  (2), and

wherein the lower layer flattening layer has a thickness B in nm which satisfies formulas (3) and (4):

0< B≤ 200 nm  (3)

C≤A+B+ 200 nm  (4)

where A represents a thickness in nm of the first-color color filter of the first color among the plurality of colors, C represents a thickness in nm of the color filters of the colors other than the first color, and A and C are different values,

the method comprising:

forming the lower layer flattening layer on the semiconductor substrate;

applying a coating liquid for the first-color color filter onto the lower layer flattening layer;

curing the coating liquid such that the color filter layer is formed on the lower layer flattening layer;

removing, by dry etching, a portion of the color filter layer other than a portion where the first-color color filter is to be formed, and a portion of the lower layer flattening layer below the portion of the color filter layer to be removed, such that the first-color color filter is formed; and

forming the color filters of the colors other than the first color by photolithography.