Pattern cross-sectional shape estimation system and program

1. A pattern cross-sectional shape estimation system, comprising:

a charged particle ray device which includes a scanning deflector that scans a charged particle beam emitted from a charged particle source, a signal electron focusing lens and a signal electronic aperture that are controlled to perform discrimination of signal electrons emitted from a sample based on their angle, where the signal electron focusing lens controls a spread of signal electrons and the signal electronic aperture that restricts a detection angle of the signal electrons, and at least one detector that detects the signal electrons at different detection angles; and

an arithmetic device that generates a luminance of an image based on an output of the at least one detector, and calculates a signal waveform of a designated region on the image using the luminance,

wherein the arithmetic device generates a plurality of angle discrimination images using signal electrons at the different detection angles, and estimates a side wall shape of a measurement target pattern based on a change in a pattern dimension calculated from a signal waveform of each angle discrimination image with respect to each of the different detection angles.

2. The pattern cross-sectional shape estimation system according to claim 1 ,

wherein the arithmetic device estimates a cross-sectional shape in a depth direction of the measurement target pattern from a change in a dimensional value obtained with a different threshold value for a signal waveform of each of the angle discrimination images.

3. The pattern cross-sectional shape estimation system according to claim 1 ,

wherein the arithmetic device classifies a pattern shape based on an estimation result of the measurement target pattern, and displays information on the pattern shape and information on a taper angle of a taper portion included in the measurement target pattern on a display screen.

4. The pattern cross-sectional shape estimation system according to claim 1 ,

wherein the arithmetic device acquires, as a reference, a change in dimension with respect to a detection angle of a known pattern whose cross-sectional shape is known in advance from a storage device, and estimates a shape of the measurement target pattern from a difference between a change of the known pattern and a change in the calculated pattern dimension with respect to a detection angle.

5. A non-transitory computer readable storage medium storing thereon a program for causing a computer to execute a process of estimating a cross-sectional shape of a pattern to be measured,

wherein the process comprises the steps of:

performing discrimination of signal electrons emitted from a sample, scanned by a charged particle beam emitted from a charged particle source, based on their angle, by controlling an electron focusing lens and a signal electronic aperture, where the signal electron focusing lens controls a spread of signal electrons and the signal electronic aperture restricts a detection angle of the signal electrons;

detecting, by at least one detector, the signal electrons at different detection angles;

generating, by an arithmetic device, a luminance of an image based on an output of the at least one detector;

calculating, by the arithmetic device, a signal waveform of a designated region on the image using the luminance,

generating, by the arithmetic device, a plurality of angle discrimination images using signal electrons at the different detection angles; and

estimating, by the arithmetic device, a side wall shape of a measurement target pattern based on a change in a pattern dimension calculated from a signal waveform of each angle discrimination image with respect to each of the different detection angles.