Semiconductor devices and methods of manufacture
3D-NOR memory array devices and methods of manufacture are disclosed herein. A method includes forming a multi-layer stack over a substrate by forming alternating layers of an isolation material and a dummy material. An array of dummy nanostructures is formed in a channel region of the multi-layer stack by performing a wire release process. Once the nanostructures have been formed, a single layer of an oxide semiconductor material is deposited over and surrounds the dummy nanostructures. A memory film is then deposited over the oxide semiconductor material and a conductive wrap-around structure is formed over the memory film. Source/bit line structures may be formed by replacing the layers of the dummy material outside of the channel region with a metal fill material. A staircase conductor structure can be formed the source/bit line structures in a region of the multi-layer stack adjacent the memory array.
1. A method comprising:
forming a multi-layer stack over a substrate, the multi-layer stack comprising alternating layers of an isolation material and a dummy material;
forming an array of dummy nanostructures in a channel region of the multi-layer stack;
depositing a semiconductor material surrounding the array of dummy nanostructures;
depositing a memory film around the semiconductor material; and
forming a conductive structure around the memory film.
2. The method of claim 1 , wherein the forming the multi-layer stack comprises using a first material for the isolation material and using a second material for the dummy material, the second material being different from the first material.
3. The method of claim 2 , further comprising forming source/bit line structures by replacing the dummy material located outside of the channel region with a conductive material.
4. The method of claim 3 , further comprising forming a staircase contact structure from the source/bit line structures outside of the channel region.
5. The method of claim 3 , wherein the forming the source/bit line structures further comprises forming recesses within the dummy nanostructures.
6. The method of claim 5 , wherein the forming the source/bit lines structures further comprises filling the recesses with the conductive material.
7. The method of claim 1 , further comprising:
etching an opening through the conductive structure, the memory film, and the semiconductor material in a location between adjacent stacks of the array of dummy nanostructures; and
depositing a dielectric material in the opening.
8. A method comprising:
depositing a first material over a substrate;
forming a multi-layer stack by depositing a second material over the first material;
forming a fin in a channel region of the multi-layer stack;
forming a dummy channel core by removing the first material from the fin;
depositing a semiconductor material over and surrounding the dummy channel core;
depositing a memory film layer over the semiconductor material;
forming a conductive structure over the memory film layer; and
replacing remaining portions of the second material located outside of the channel region with a conductive material.
9. The method of claim 8 , wherein the depositing the semiconductor material deposits an oxide material.
10. The method of claim 9 , wherein the oxide material is indium gallium zinc oxide.
11. The method of claim 8 , wherein the replacing the remaining portions of the second material further comprises forming slits in the multi-layer stack on opposite sides of the dummy channel core.
12. The method of claim 11 , wherein the replacing the remaining portions of the second material further comprises etching the second material exposed along sidewalls of the slits.
13. The method of claim 12 , wherein the replacing the remaining portions of the second material further comprises forming recesses within the dummy channel core.
14. The method of claim 8 , further comprising forming a staircase contact structure in electrical connection with the conductive material.
15. The method of claim 8 , wherein the depositing the memory film layer comprises depositing a ferroelectric material.
16. A device comprising:
a memory cell stack comprising a stack of dummy nanostructure cores;
a semiconductor wrap-around channel structure surrounding each one of the dummy nanostructure cores within the stack of dummy nano structure cores;
a memory film surrounding the semiconductor wrap-around channel structure; and
a wrap-around word line surrounding the semiconductor wrap-around channel structure.
17. The device of claim 16 , further comprising a stack of source line structures and a stack of bit line structures, each bit line structure within the stack of bit line structures being separated from a corresponding one of the source line structures within the stack of source line structures by a corresponding one of the dummy nanostructure cores within the stack of dummy nanostructure cores.
18. The device of claim 17 , wherein the stack of source line structures and the stack of bit line structures are separated from the wrap-around word line by the semiconductor wrap-around channel structure.
19. The device of claim 17 , further comprising a stack of isolation regions, wherein the stack of source line structures are isolated from one another by the stack of isolation regions.
20. The device of claim 16 , wherein the semiconductor wrap-around channel structure is an oxide semiconductor film.