Monolithic multijunction power converter
Resonant cavity power converters for converting radiation in the wavelength range from 1 micron to 1.55 micron are disclosed. The resonant cavity power converters can be formed from one or more lattice matched GaInNAsSb junctions and can include distributed Bragg reflectors and/or mirrored surfaces for increasing the power conversion efficiency.
1. A method of making a multijunction power converter, comprising:
growing a first semiconductor layer overlying a GaAs or Ge substrate, wherein the first semiconductor layer does not absorb at a monochromatic wavelength, wherein the monochromatic wavelength is within a range from 1.3 micron to 1.55 micron;
growing a first GaInNAsSb junction on the first semiconductor layer, wherein the first GaInNAsSb junction has a bandgap configured to absorb at the monochromatic wavelength;
growing a first tunnel junction on the first GaInNAsSb junction;
growing a second GaInNAsSb junction on the first tunnel junction, wherein the second GaInNAsSb junction has the bandgap configured to absorb at the monochromatic wavelength;
growing a second semiconductor layer overlying the second GaInNAsSb junction, wherein the second semiconductor layer does not absorb at the monochromatic wavelength;
growing a distributed bragg reflector overlying the GaAs or Ge substrate, wherein the first semiconductor layer overlies the distributed bragg reflector, wherein the distributed bragg reflector comprises layers of GaAs and AlGaAs; and
thinning the GaAs or Ge substrate wherein incoming radiation is first incident on the GaAs or Ge substrate before being incident on the first and second GaInNAsSb junctions.
2. The method of claim 1 , further comprising, after growing the second GaInNAsSb junction:
growing a second tunnel junction on the second GaInNAsSb junction; and
growing a third GaInNAsSb junction on the second tunnel junction, wherein the third GaInNAsSb junction has a bandgap configured to absorb at the monochromatic wavelength;
wherein the growing the second semiconductor layer, comprises growing the second semiconductor layer overlying the third GaInNAsSb junction.
3. The method of claim 1 , wherein each of the first semiconductor layer and the second semiconductor layer comprises GaAs.
4. The method of claim 1 , wherein the monochromatic wavelength is 1.32 microns.
5. The method of claim 1 , wherein the multijunction power converter has a power conversion efficiency of at least 20% for an input power within a range from 0.6 W to 6 W.
6. The method of claim 1 , further comprising:
growing a second distributed bragg reflector, the second distributed bragg reflector overlying the second semiconductor layer.
7. The method of claim 6 , further comprising:
bonding the second distributed bragg reflector to a heatsink.
8. The method of claim 1 , further comprising:
growing a back mirror, the back mirror overlying the second semiconductor layer.
9. The method of claim 8 , wherein growing the back mirror comprises growing gold or a gold/nickel alloy.
10. The method of claim 1 , wherein the GaAs or Ge substrate has a bandgap higher than the bandgap of the first GaInNAsSb junction and the second GaInNAsSb junction.
11. The method of claim 1 , wherein the first GaInNAsSb junction or the second GaInNAsSb junction comprises Ga 1-x In x N y As 1-y-z Sb z , wherein:
0≤x≤0.24, 0.01≤y≤0.07, and 0.001≤z≤0.20;
0.02≤x≤0.24, 0.01≤y≤0.07, and 0.001≤z≤0.03;
0.02≤x≤0.18, 0.01≤y≤0.04, and 0.001≤z≤0.03;
0.08≤x≤0.18, 0.025≤y≤0.04, and 0.001≤z≤0.03; or
0.06≤x≤0.20, 0.02≤y≤0.05, and 0.005≤z≤0.02.
12. The method of claim 1 , wherein the first tunnel junction or the second tunnel junction comprises Ga 1-x In x N y As 1-y-z Sb z , wherein:
0≤x≤0.18, 0.01≤y≤0.05, and 0.001≤z≤0.15;
0≤x≤0.18, 0.001≤y≤0.05, and 0.001≤z≤0.03;
0.02≤x≤0.18, 0.005≤y≤0.04, and 0.001≤z≤0.03;
0.04≤x≤0.18, 0.01≤y≤0.04, and 0.001≤z≤0.03;
0.06≤x≤0.18, 0.015≤y≤0.04, and 0.001≤z≤0.03; or
0.08≤x≤0.18, 0.025≤y≤0.04, and 0.001≤z≤0.03.
13. The method of claim 1 , wherein the GaAs or Ge substrate is thinned to a thickness less than 50 microns, from 150 microns to 250 microns, or from 175 microns to 225 microns.