IP Library Granted Patent US 11,243,115
Granted Patent B2
US 11,243,115 · App. 17/030,328 · Granted Feb 8, 2022

Optical system for reference switching

Inventors: Mark Alan Arbore (Los Altos, CA); Gary Shambat (San Francisco, CA); Matthew A. Terrel (Campbell, CA)
G01J3/0229G01J3/0205G01J3/0216G01J3/0256G01J3/0294G01J3/10G01J3/108G01J3/36G01J3/42G01N21/25G01N21/49G01N2021/4711
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Quick Facts
Patent No.
US 11,243,115
App. No.
17/030,328
Granted
Feb 8, 2022
Kind
B2
Abstract

Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, et al. on effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

Claims (45)

1. A system for determining properties of a sample, the system comprising:

one or more light sources;

a detector array; and

a first substrate comprising:

illumination optics; and

first collection optics;

a second substrate comprising:

second collection optics configured to receive and redirect at least the portion of the return of the light to the first collection optics, wherein:

the illumination optics and the first collection optics are formed on one or more surfaces of the first substrate;

the illumination optics configured to receive light emitted by the one or more light sources and redirect the light towards the sample;

the first collection optics configured to receive at least a portion of a return of the light and redirect the light towards the detector array;

the second collection optics comprise lenses; and

the detector array configured to detect the light redirected by the first collection optics and generate one or more signals indicative of the properties of the sample.

2. The system of claim 1 , wherein the second collection optics are integrated into the second substrate.

3. The system of claim 1 , further comprising:

a medium located between the first substrate and the second substrate, wherein the medium has a refractive index such that an angle of the light exiting the second collection optics is decreased relative to an angle of the light incident on the second collection optics.

4. The system of claim 1 , further comprising:

a medium located between the first substrate and the detector array, wherein the medium is a conformal insulating material that provides mechanical support.

5. The system of claim 1 , further comprising:

an aperture layer including one or more openings configured to selectively allow the light to pass through to the first collection optics.

6. The system of claim 5 , wherein the aperture layer is formed on the one or more surfaces of the second substrate.

7. The system of claim 5 , wherein the aperture layer is formed on the one or more surfaces of the first substrate.

8. The system of claim 5 , wherein the aperture layer is located a focal length away from the first substrate.

9. The system of claim 1 , further comprising:

a second substrate including second collection optics, the second collection optics configured to receive the light from the first collection optics and redirect the light to the detector array.

10. The system of claim 1 , wherein the first substrate is located between the sample and the detector array.

11. The system of claim 1 , wherein the first collection optics are integrated into the first substrate.

12. The system of claim 1 , further comprising:

an outcoupler configured to:

receive the light emitted by the one or more light sources; and

redirect the light towards the illumination optics, wherein the outcoupler contacts one of the one or more surfaces of the first substrate.

13. The system of claim 12 , wherein the outcoupler is formed on a third substrate, and the third substrate is located closer to the first substrate than the detector array.

14. A method for determining properties of a sample, the method comprising:

receiving light emitted by one or more light sources and redirecting the light towards the sample using illumination optics, the illumination optics formed on one or more surfaces of a first substrate;

receiving at least a portion of the return of the light using second collection optics formed on one or more surface of a second substrate, the second collection optics comprising lenses;

redirecting at least the portion of the return of the light to first collection optics using the second collection optics;

receiving at least the portion of a return of the light and redirecting the light towards a detector array using first collection optics, the first collection optics formed on the one or more surfaces of the first substrate;

detecting the light redirected by the first collection optics using the detector array; and

generating one or more signals indicative of at least some properties of the sample using the detector array.

15. The method of claim 14 , further comprising:

decreasing an angle of the light redirected by the first collection optics.

16. The method of claim 14 , further comprising:

selectively allowing the light redirected by the first collection optics to pass through using an aperture layer.

17. The method of claim 14 , further comprising:

receiving the light redirected by the first collection optics and redirecting the light towards second collection optics.

Continuity (3)
Continuation 16095311
Provisional Application 62325908 · Apr 21, 2016
Related Publication 20210010860A1 · Jan 14, 2021
Cited By (5)
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