Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon

1. A data processing method performed by a computer for processing time-series data acquired in a substrate processing apparatus including one or more processing units, comprising:

receiving the time-series data corresponding to each of the processing units in the substrate processing apparatus, wherein the time-series data includes a plurality of physical quantities each measured using sensors during execution of a fabrication process on a substrate within the corresponding processing unit;

converting the time-series data into a plurality of evaluated values by comparing the time-series data with reference data;

classifying the evaluated values into a plurality of levels; and

displaying an evaluation result screen including a first graph showing an occurrence rate of each level of the evaluated values with respect to the processing units and a second graph showing temporal change in the number of occurrences of a worst level of the evaluated values when substrates have been processed through a predetermined method for each of the processing units, wherein the first graph and the second graph are displayed for each of the processing units,

wherein the plurality of levels includes a best level and the worst level, the level is better as the evaluated value is smaller, and the first graph is displayed so that a worse level is displayed in a darker color,

in response to a selection of one of the processing units received from an input device, displaying recipes performed by the selected processing units and the occurrence rate of the worst level corresponding to each of the recipes; and

in response to a selection of one of the recipes, displaying the number of occurrences of each level corresponding to the selected recipe performed by the selected processing unit during a plurality of specified time periods and highlighting the selected recipe corresponding to at least one of the specified time periods that the worst level occurs.

2. The data processing method according to claim 1 , wherein the first graph is a circle graph or a band graph.

3. The data processing method according to claim 1 , wherein the evaluation result screen further includes the number of occurrences of each level of the evaluated values with respect to the processing units.

4. The data processing method according to claim 1 , wherein the second graph is a bar graph or a broken line graph.

5. The data processing method according to claim 1 , wherein the data processing method further comprises selecting levels related to substrates which satisfy a given condition from levels obtained,

and displaying the evaluation result screen on the basis of the levels selected.

6. The data processing method according to claim 5 , wherein the levels having at least any of a substrate processing period, a process performed on substrates, and a processing unit which has processed substrates as a condition are selected.

7. The data processing method according to claim 1 , wherein at least any of a screen for selecting a method through which the evaluated values have been obtained, a history screen displaying a history in which the evaluated values have been obtained, a screen for selecting a display target and a screen including a graph of the time-series data, or a trend screen including graphs showing temporal change in the evaluated values in addition to the evaluation result screen is hierarchically displayed.

8. The data processing method according to claim 7 , wherein the trend screen is displayed, and a mark is attached at a position corresponding to a processing result selected in the history screen in a graph in the trend screen.

9. The data processing method according to claim 1 , wherein a log statistics screen including a graph showing temporal change in the number of occurrences of each level of the evaluated values with respect to substrates processed within a totalization period, and a graph showing the number of occurrences of the worst level of the evaluated values, which is divided into occurrence causes, in a ranking form with respect to substrates processed within the totalization period is displayed.

10. The data processing method according to claim 1 , wherein the reference data is other time-series data.

11. The data processing method according to claim 1 , wherein the first graph and the second graph are displayed for each of the processing units, in a divided area corresponding to each of the processing units.

12. The data processing method according to claim 1 , wherein the second graph is displayed in a manner where a height of the second graph is adjusted such that a height of a most frequent element becomes constant.

13. The data processing method according to claim 1 , wherein the second graph shows the number of occurrences of the worst level of the evaluated values for each period when a period for obtaining the evaluated values is divided into two or more periods.

14. The data processing method according to claim 1 , wherein the second graph shows a result obtained when processing is performed using a specific recipe selected from among a plurality of recipes.

15. A data processing apparatus for processing time-series data acquired in a substrate processing apparatus including one or more processing units, wherein the data processing apparatus comprises

a computer that:

receives the time-series data corresponding to each of the processing units in the substrate processing apparatus, wherein the time-series data includes a plurality of physical quantities each measured using sensors during execution of a fabrication process on a substrate within the corresponding processing unit;

converts the time-series data into a plurality of evaluated values by comparing the time-series data with reference data;

classifies the evaluated values into a plurality of levels; and

displays an evaluation result screen including a first graph showing an occurrence rate of each level of the evaluated values with respect to the processing units and a second graph showing temporal change in the number of occurrences of a worst level of the evaluated values when substrates have been processed through a predetermined method for each of the processing units, wherein the first graph and the second graph are displayed for each of the processing units,

wherein the plurality of levels includes a best level and the worst level, the level is better as the evaluated value is smaller, and the first graph is displayed so that a worse level is displayed in a darker color,

in response to a selection of one of the processing units received from an input device, displaying recipes performed by the selected processing units and the occurrence rate of the worst level corresponding to each of the recipes; and

in response to a selection of one of the recipes, displaying the number of occurrences of each level corresponding to the selected recipe performed by the selected processing unit during a plurality of specified time periods and highlighting the selected recipe corresponding to at least one of the specified time periods that the worst level occurs.

16. The data processing apparatus according to claim 15 , wherein the evaluation result screen further includes the number of occurrences of each level of the evaluated values with respect to the processing units.

17. The data processing apparatus according to claim 15 , wherein the computer further selects levels related to substrates which satisfy a given condition from levels obtained,

and displays the evaluation result screen on the basis of the levels selected.

18. The data processing apparatus according to claim 15 , wherein the computer hierarchically displays at least any of a screen for selecting a method through which the evaluated values have been obtained, a history screen displaying a history in which the evaluated values have been obtained, a screen for selecting a display target and a screen including a graph of the time-series data, or a trend screen including graphs showing temporal change in the evaluated values in addition to the evaluation result screen.

19. A non-transitory computer-readable recording medium recording a data processing program for processing time-series data acquired in a substrate processing apparatus including one or more processing units, the data processing program causing a computer to execute, by a CPU using a memory:

receiving the time-series data corresponding to each of the processing units in the substrate processing apparatus, wherein the time-series data includes a plurality of physical quantities each measured using sensors during execution of a fabrication process on a substrate within the corresponding processing unit;

converting the time-series data into a plurality of evaluated values by comparing the time-series data with reference data;

classifying the evaluated values into a plurality of levels; and

displaying an evaluation result screen including a first graph showing an occurrence rate of each level of the evaluated values with respect to the processing units and a second graph showing temporal change in the number of occurrences of a worst level of the evaluated values when substrates have been processed through a predetermined method for each of the processing units, wherein the first graph and the second graph are displayed for each of the processing units,

wherein the plurality of levels includes a best level and the worst level, the level is better as the evaluated value is smaller, and the first graph is displayed so that a worse level is displayed in a darker color,

in response to a selection of one of the processing units received from an input device, displaying recipes performed by the selected processing units and the occurrence rate of the worst level corresponding to each of the recipes; and

in response to a selection of one of the recipes, displaying the number of occurrences of each level corresponding to the selected recipe performed by the selected processing unit during a plurality of specified time periods and highlighting the selected recipe corresponding to at least one of the specified time periods that the worst level occurs.