Solid particle source, treatment system and method
The invention relates to various embodiments of a solid particle-source ( 100 a, 100 a ) that can comprise: a container ( 104 ) which comprises an area for receiving solid particles; at least one electron source ( 106 ) for introducing electrons into the solid particles such that an electrostatic charge of the solid particles produced by the electrons separates them from each other and accelerates them in a direction out from the container ( 104 ); a vibration source ( 110 ) which is designed to introduce a vibration in the region in order to loosen the solid particles, the electronic source comprising an emission surface for emitting electrons into a vacuum emission region.
1. A solid particle source, comprising:
a container containing a region for receiving solid particles;
at least one electron source for introducing electrons into the solid particles in such a way that an electrostatic charging of the solid particles that is brought about by said electrons separates said solid particles from one another and accelerates them in a direction out of the container;
a vibration source configured to couple a vibration into the region in order to loosen the solid particles;
wherein the electron source comprises an emission surface for emitting electrons into a vacuum emission region.
2. The solid particle source as claimed in claim 1 ,
wherein the vibration source comprises an electromechanical transducer.
3. The solid particle source as claimed in claim 1 ,
wherein the vibration source comprises an electrical coil.
4. The solid particle source as claimed in claim 1 ,
wherein the vibration source comprises a membrane adjoining the region.
5. The solid particle source as claimed in claim 1 ,
wherein the vibration source is configured to transmit an electromagnetic vibration generated outside the region into the container.
6. The solid particle source as claimed in claim 1 ,
wherein the vibration source is configured to transmit a mechanical vibration generated outside the region into the container and/or onto the container.
7. A treatment system, comprising:
the solid particle source of claim 1 , and
a collecting device for collecting solid particles which are accelerated out of the region.
8. The treatment system as claimed in claim 7 ,
wherein the collecting device comprises a substrate holder for holding a substrate to be coated with a substrate surface of the substrate in the direction of the region.
9. The treatment system as claimed in claim 7 ,
wherein the collecting device comprises an additional container and is configured to collect solid particles by means of the additional container and/or to transport them into the latter.
10. The treatment system as claimed in claim 7 , furthermore comprising:
a vacuum chamber, in which the region and/or the collecting device are/is arranged.
11. The treatment system as claimed in claim 7 , furthermore comprising:
a coating region, which is arranged between the collecting device and the solid particle source or in which the collecting device is arranged;
a material vapor source configured to emit a material vapor into the coating region.