IP Library Granted Patent US 11,261,346
Granted Patent B2
US 11,261,346 · App. 16/090,195 · Granted Mar 1, 2022

Polishing composition

Inventor: Tomoaki Ishibashi (Kiyosu, JP)
Assignee: FUJIMI INCORPORATED
C09G1/02C09K3/1445H01L21/02024H01L21/304C09K3/1436
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Quick Facts
Patent No.
US 11,261,346
App. No.
16/090,195
Granted
Mar 1, 2022
Kind
B2
Abstract

The present invention provides a polishing composition for use in polishing a material having a Vickers hardness of 1500 Hv or higher. The polishing composition comprises an alumina abrasive and water. The alumina abrasive has an isoelectric point that is below 8.0 and is lower than the pH of the polishing composition.

Claims (19)

1. A polishing composition used for polishing a material having a Vickers hardness of 1500 Hv or higher, the polishing composition comprising:

an abrasive consisting of an alumina abrasive;

an oxidizing agent as a polishing aid; and

water,

wherein:

the oxidizing agent is one or more permanganates;

the alumina abrasive has an isoelectric point that is below 8.0 and is lower than the pH of the polishing composition; and

the isoelectric point of the alumina abrasive is higher than an isoelectric point of the material subject to polishing.

2. The polishing composition according to claim 1 , wherein the isoelectric point of the alumina abrasive is 5.0 to 7.0.

3. The polishing composition according to claim 1 , wherein the pH is 8.0 or higher.

4. The polishing composition according to claim 1 , wherein the material subject to polishing is silicon carbide.

5. The polishing composition according to claim 1 , wherein pH com minus IEP A1 (pH com -IEP A1 ) is 4.5 or less, wherein the pH com represents the pH of the polishing composition and the IEP A1 represents the isoelectric point of the alumina abrasive.

6. The polishing composition according to claim 1 , wherein a relationship between IEP A1 and pH com satisfies 0.6≤IEP A1 /pH com ≤0.8, wherein the IEP A1 represents the isoelectric point of the alumina abrasive and the pH com represents the pH of the polishing composition.

7. The polishing composition according to claim 1 , wherein a relationship between IEP A1 and IEP B satisfies 1.2≤IEP A1 /IEP B ≤3, wherein the IEP A1 represents the isoelectric point of the alumina abrasive and the IEP B represents the isoelectric point of the material subject to polishing.

8. The polishing composition according to claim 1 , wherein IEP A1 minus IEP B (IEP A1 -IEP B ) is 1.5 or greater and 4.5 or less, wherein the IEP A1 represents the isoelectric point of the alumina abrasive and the IEP B represents the isoelectric point of the material subject to polishing.

9. A method for producing a polished object, the method comprising polishing an object having a Vickers hardness of 1500 Hv or higher by supplying the polishing composition according to claim 1 to the object.

10. The method according to claim 9 , wherein the object is formed of diamond, sapphire, silicon carbide, boron carbide, zirconium carbide, tungsten carbide, silicon nitride, or gallium nitride.

11. The method according to claim 9 , wherein the object has a surface to be polished, the surface being formed of silicon carbide.

12. The method according to claim 9 , wherein the object has a surface to be polished, the surface being a single crystal silicon carbide.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2018
From: ISHIBASHI, TOMOAKI
To: FUJIMI INCORPORATED
Reel/Frame 047013/0353 →
Priority Claims (1)
JP JP2016-071478 · Mar 31, 2016 · national
Continuity (1)
Related Publication 20190112506A1 · Apr 18, 2019