IP Library Granted Patent US 11,264,394
Granted Patent B2
US 11,264,394 · App. 17/083,208 · Granted Mar 1, 2022

Integrated components which have both horizontally-oriented transistors and vertically-oriented transistors

Inventors: Scott J. Derner (Boise, ID); Charles L. Ingalls (Meridian, ID)
Assignee: Micron Technology, Inc.
H01L27/11507H01L23/528H01L27/108H01L27/11514H01L29/0847H01L29/78H01L29/7827H01L27/0207H01L28/75
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Quick Facts
Patent No.
US 11,264,394
App. No.
17/083,208
Granted
Mar 1, 2022
Kind
B2
Abstract

Some embodiments include an integrated assembly. The integrated assembly has a first transistor with a horizontally-extending channel region between a first source/drain region and a second source/drain region; has a second transistor with a vertically-extending channel region between a third source/drain region and a fourth source/drain region; and has a capacitor between the first and second transistors. The capacitor has a first electrode, a second electrode, and an insulative material between the first and second electrodes. The first electrode is electrically connected with the first source/drain region, and the second electrode is electrically connected with the third source/drain region. A digit line is electrically connected with the second source/drain region. A conductive structure is electrically connected with the fourth source/drain region.

Claims (15)

1. Integrated memory, comprising:

two-transistor-one-capacitor (2T-1C) memory devices; the 2T-1C memory devices being in paired arrangements, with each paired arrangement comprising a first 2T-1C memory device and a second 2T-1C memory device; the first 2T-1C memory devices each including a first transistor having a horizontally-extending channel region, a second transistor having a vertically-extending channel region, and a first capacitor between the first and second transistors; the second 2T-1C memory devices each including a third transistor having a horizontally-extending channel region, a fourth transistor having a vertically-extending channel region, and a second capacitor between the third and fourth transistors; each of the first transistors having first and second source/drain regions on opposing sides of its channel region; each of the second transistors having third and fourth source/drain regions on opposing sides of its channel region with the vertically-extending channel region, the third source/drain region and the fourth source/drain region being disposed within a semiconductor pillar; each of the third transistors having a fifth source/drain region on one side of its channel region, and having the second source/drain region on an opposing side of its channel region; each of the fourth transistors having sixth and seventh source/drain regions on opposing sides of its channel region; the first and fifth source/drain regions being electrically coupled with the first and second capacitors, respectively; the third and sixth source/drain regions being electrically coupled with the first and second capacitors, respectively, the first capacitor having an electrode in direct physical contact with the semiconductor pillar;

first comparative digit lines electrically connected with the second source/drain regions;

second comparative digit lines electrically connected with the fourth and seventh source/drain regions; and

the first and second comparative digit lines being comparatively coupled to one another through sense amplifiers.

2. The integrated memory of claim 1 wherein:

each of the first capacitors has a first bottom electrode electrically connected with the first source/drain region, has a first top electrode electrically connected with the third source/drain region, and has a first dielectric material between the first bottom electrode and the first top electrode; and

each of the second capacitors has a second bottom electrode electrically connected with the fifth source/drain region, has a second top electrode electrically connected with the sixth source/drain region, and has a second dielectric material between the second bottom electrode and the second top electrode.

3. The integrated memory of claim 2 wherein:

the first and second bottom electrodes are configured as first and second container-shaped structures having first and second upwardly-opening containers comprised thereby;

the first and second dielectric materials extend into the first and second upwardly-opening containers, respectively; and

the first and second top electrodes extend into the first and second upwardly-opening containers, respectively.

4. The integrated memory of claim 1 wherein the vertically-extending channel regions are about the same lengths as the horizontally-extending channel regions.

5. The integrated memory of claim 1 wherein the vertically-extending channel regions are not about the same lengths as the horizontally-extending channel regions.

6. The integrated memory of claim 1 being within a tier of a multitier assembly.

Continuity (2)
Division 16379365 · Apr 9, 2019
Related Publication 20210074714A1 · Mar 11, 2021
Cited By (2)
US 12,621,997 US 12,720,721