Semiconductor device and method for manufacturing the same
To provide a semiconductor device with favorable electrical characteristics. To provide a method for manufacturing a semiconductor device with high productivity. To reduce the temperatures in a manufacturing process of a semiconductor device. An island-like oxide semiconductor layer is formed over a first insulating film; a second insulating film and a first conductive film are formed in this order, covering the oxide semiconductor layer; oxygen is supplied to the second insulating film through the first conductive film; a metal oxide film is formed over the second insulating film in an atmosphere containing oxygen; a first gate electrode is formed by processing the metal oxide film; a third insulating film is formed, covering the first gate electrode and the second insulating film; and first heat treatment is performed. The second insulating film and the third insulating film each include oxide. The highest temperature in the above steps is 340° C. or lower.
1. A manufacturing method of a semiconductor device, comprising:
a first step of forming an oxide semiconductor layer over a first insulating film;
a second step of forming a second insulating film and a first conductive film in this order to cover the oxide semiconductor layer;
a third step of supplying oxygen to the second insulating film through the first conductive film;
a fourth step of forming a metal oxide film over and in contact with the second insulating film by a sputtering method in an atmosphere containing oxygen;
a fifth step of forming a first gate electrode by processing the metal oxide film;
a sixth step of forming a third insulating film to cover the first gate electrode and the second insulating film; and
a seventh step of performing a first heat treatment,
wherein the second insulating film and the third insulating film each include an oxide,
wherein the first to the seventh steps are performed in this order, and
wherein a highest temperature in the first to the seventh steps is lower than or equal to 340° C.
2. The manufacturing method of a semiconductor device, according to claim 1 ,
wherein, in the third step, oxygen plasma treatment is performed with an apparatus including a pair of parallel-plate electrodes in a state where a bias voltage is applied between the pair of parallel-plate electrodes.
3. The manufacturing method of a semiconductor device, according to claim 1 ,
wherein, in the fourth step, the metal oxide film is formed by the sputtering method in an atmosphere in which oxygen partial pressure is higher than or equal to 50% and lower than or equal to 100%.
4. The manufacturing method of a semiconductor device, according to claim 1 ,
wherein, in the second step, the first conductive film is formed to include a metal or a metal oxide and have a thickness of greater than or equal to 2 nm and less than or equal to 10 nm.
5. A manufacturing method of a semiconductor device, comprising:
forming an oxide semiconductor layer;
forming a first insulating film over the oxide semiconductor layer;
forming a conductive film over the first insulating film;
supplying oxygen to the first insulating film through the conductive film;
forming a metal oxide film over and in contact with the first insulating film by a sputtering method in an atmosphere containing oxygen; and
forming a gate electrode by processing the metal oxide film.