Ferroelectric field effect transistor with nanowire core
A ferroelectric field effect transistor (FeFET) is provided. The FeFET includes a buried oxide (BOX) layer; a nanowire layer including pads formed on the BOX layer at source and drain regions of the FeFET, and a nanowire core extending between the pads and over a recess formed in the BOX layer; a metal electrode coating the nanowire core; a ferroelectric layer coating the metal electrode; an interfacial layer coating the ferroelectric layer; and a polysilicon layer formed over a channel region of the FeFET, the polysilicon layer coating the interfacial layer.
1. A ferroelectric field effect transistor (FeFET) comprising:
a buried oxide (BOX) layer;
a nanowire layer including
pads formed on the BOX layer at source and drain regions of the FeFET, and
a nanowire core extending between the pads and over a recess formed in the BOX layer;
a metal electrode coating the nanowire core;
a ferroelectric layer coating the metal electrode;
an interfacial layer coating the ferroelectric layer; and
a polysilicon layer formed over a channel region of the FeFET, the polysilicon layer coating the interfacial layer.
2. The FeFET according to claim 1 , wherein a cross-sectional shape of the nanowire core is circular.
3. The FeFET according to claim 1 , further comprising:
an insulator oxide layer formed in the source and drain regions of the FeFET that is configured to separate active regions of the FeFET,
wherein the polysilicon layer is also formed over at least portions of the insulator oxide layer.
4. The FeFET according to claim 3 , wherein the insulator oxide layer comprises at least one selected from the group consisting of silicon dioxide (SiO 2 ), silicon oxynitride (SiON), hafnium oxide (HfO 2 ), and any other suitable high-κ dielectric material.
5. The FeFET according to claim 1 , wherein the nanowire layer comprises at least one of Si or silicide.
6. The FeFET according to claim 1 , wherein the ferroelectric oxide layer comprises HfO 2 based ferroelectrics.
7. The FeFET according to claim 6 , wherein the ferroelectric oxide layer has a thickness ranging from 1 nm to 30 nm.
8. The FeFET according to claim 1 , wherein the interfacial layer comprises at least one selected from the group consisting of SiO 2 , SiON and SiN.
9. The FeFET according to claim 1 , wherein the interfacial layer has a cylindrical shell shape.
10. The FeFET according to claim 1 , wherein the interfacial layer has a thickness ranging from 1 nm to 5 nm.
11. A method of fabricating a ferroelectric field effect transistor (FeFET) comprising:
forming a buried oxide (BOX) layer;
forming a nanowire layer on the BOX layer, the nanowire layer including
pads formed on the BOX layer at source and drain regions of the FeFET, and
a nanowire core extending between the pads;
undercutting the BOX layer beneath the nanowire core to release the nanowire core from the BOX layer;
forming a metal electrode around the nanowire core;
forming a ferroelectric layer around the metal electrode;
forming an interfacial layer around the ferroelectric layer; and
forming a poly silicon layer over a channel region of the FeFET, the poly silicon layer coating the interfacial layer.
12. The method of fabricating a FeFET according to claim 11 , further comprising subjecting the nanowire core to at least one of an annealing process and an oxidation process to change a shape of the nanowire core to a cylindrical shape.
13. The method of fabricating a FeFET according to claim 11 , further comprising:
forming an insulator oxide layer formed in the source and drain regions of the FeFET that is configured to separate active regions of the FeFET,
wherein the polysilicon layer is also formed over at least portions of the insulator oxide layer.
14. The method of fabricating a FeFET according to claim 13 , wherein the insulator oxide layer comprises at least one selected from the group consisting of silicon dioxide (SiO 2 ), silicon oxynitride (SiON), hafnium oxide (HfO 2 ), and any other suitable high-κ dielectric material.
15. The method of fabricating a FeFET according to claim 11 , wherein the nanowire layer comprises at least one of Si or silicide.
16. The method of fabricating a FeFET according to claim 11 , wherein the ferroelectric oxide layer comprises HfO 2 based ferroelectrics.
17. The method of fabricating a FeFET according to claim 16 , wherein the ferroelectric oxide layer has a thickness ranging from 1 nm to 30 nm.
18. The method of fabricating a FeFET according to claim 11 , wherein the interfacial layer comprises at least one selected from the group consisting of SiO 2 , SiON and SiN.
19. The method of fabricating a FeFET according to claim 11 , wherein the interfacial layer has a cylindrical shell shape.
20. The method of fabricating a FeFET according to claim 11 , wherein the interfacial layer has a thickness ranging from 1 nm to 5 nm.