Integrated circuit device with bonding structure and method of forming the same
An integrated circuit device includes a first substrate, a second substrate, a first expanding pad, a second expanding pad and a bonding structure. The first substrate is provided with a first conductive portion, the second substrate is provided with a second conductive portion, the first expanding pad is formed on the first conductive portion to provide a first expanded contact area, the second expanding pad is formed on the second conductive portion to provide a second expanded contact area, and the bonding structure is formed between the first substrate and the second substrate, wherein the first expanding pad is bonded to the second expanding pad.
1. An integrated circuit device, comprising:
a first semiconductor device provided with a first diffusion barrier layer and a first conductive portion surrounded by the first diffusion barrier layer;
a second semiconductor device provided with a second diffusion barrier layer and a second conductive portion surrounded by the second diffusion barrier layer;
a first expanding pad formed on the first conductive portion to provide a first expanded contact area;
a second expanding pad formed on the second conductive portion to provide a second expanded contact area;
a bonding structure formed between the first semiconductor device and the second semiconductor device, wherein the first expanding pad is bonded to the second expanding pad;
a first polymer material surrounding the first diffusion barrier layer, wherein a least a portion of the first conductive portion is exposed through the first polymer material, and the portion of the first conductive portion is in direct contact with the first expanding pad; and
a second polymer material surrounding the second diffusion barrier layer, wherein at least a portion of the second conductive portion is exposed through the second polymer material, and the portion of the second conductive portion is in direct contact with the second expanding pad;
wherein the first expending pad and the second expending pad are formed by at least one of copper germanide (Cu 3 Ge), copper silicide (Cu 3 Si) and copper-carbon cluster (Cu 3 C).
2. The integrated circuit device of claim 1 , wherein the first expanding pad is substantially aligned with the second expanding pad.
3. The integrated circuit device of claim 2 , wherein the first conductive portion and the second conductive portion are formed by copper.
4. The integrated circuit device of claim 2 , wherein the first conductive portion and the second conductive portion are surrounded by the first expanding pad and the second expanding pad, respectively.
5. The integrated circuit device of claim 4 , wherein a portion of a sidewall of the first conductive portion is in direct contact with the first expanding pad, and a portion of a sidewall of the second conductive portion is in direct contact with the second expanding pad.
6. The integrated circuit device of claim 1 , wherein the first conductive portion and the second conductive portion are formed by copper, and the first expanding pad and the second expanding pad are formed by plating conductive materials around the first conductive portion and the second conductive portion.
7. The integrated circuit device of claim 1 , further comprising a first through-substrate via formed in the first semiconductor device and an interconnect structure formed over the first through-substrate via, wherein the first through-substrate via is between the interconnect structure and the bonding structure.