Workpiece processing method
A workpiece processing method includes a holding step of holding a workpiece with a front surface of the workpiece directed downward so as to face an upper surface side of a base supplied with a fluid curable resin, a coating step of moving the workpiece downward to press the workpiece against the curable resin, thereby coating the whole of the front surface of the workpiece with the curable resin such that the curable resin enters gaps between bumps and the front surface and the bumps are embedded in the curable resin, a curing step of curing the curable resin to form a resin film, a laser beam applying step of removing the resin film on each street, and a dividing step of supplying a gas plasma to the workpiece to divide the workpiece along each street into individual device chips with the resin film as a mask.
1. A workpiece processing method of processing a workpiece provided with a plurality of bumps in each of a plurality of regions partitioned by a plurality of streets set on a front surface side of the workpiece, the method comprising:
a holding step of holding the workpiece with the front surface of the workpiece directed downward so as to face an upper surface side of a base supplied with a fluid curable resin;
a coating step of moving the workpiece downward to press the front surface side of the workpiece against the curable resin, thereby coating a whole of the front surface of the workpiece with the curable resin such that the curable resin enters gaps between the bumps and the front surface and the bumps are embedded in the curable resin;
a curing step of curing the curable resin to form a resin film;
a laser beam applying step of applying a laser beam having such a wavelength as to be absorbed by the resin film to the resin film along each street, to thereby remove the resin film on each street, after the curing step; and
a dividing step of supplying a gas plasma to the workpiece to divide the workpiece along each street into individual device chips with the resin film as a mask, after the laser beam applying step.
2. The workpiece processing method according to claim 1 , further comprising:
a thinning step of cutting a surface of the resin film by a cutting tool to thin the resin film, before the laser beam applying step.