Conveyance apparatus and manufacturing method of article

1. A conveyance apparatus comprising:

a stator in which a plurality of coils is arranged along a first direction; and

a movable element configured to move along the plurality of coils,

wherein the stator includes a first magnet group including a plurality of first magnets arranged along the first direction and magnetized in one direction,

wherein the movable element includes a second magnet group including a plurality of second magnets arranged to face the plurality of coils, and a third magnet group including a plurality of third magnets arranged to face the first magnet group and magnetized in a direction repelling the first magnet group, and

wherein a center of the first magnet group in a second direction intersecting with the first direction and a center of the third magnet group in the second direction are arranged to be shifted from each other in the second direction.

2. The conveyance apparatus according to claim 1 , wherein the first magnet group and the third magnet group generate respective forces repelling each other therebetween in a direction of a gravitational force.

3. The conveyance apparatus according to claim 1 , wherein the third magnet group is arranged on a bottom surface of the movable element.

4. The conveyance apparatus according to claim 1 , wherein the third magnet group is arranged on a top surface of the movable element.

5. The conveyance apparatus according to claim 1 , wherein the third magnet group is arranged at a position facing a top surface of the movable element.

6. A manufacturing method of an article, the manufacturing method comprising:

manufacturing an article by processing a workpiece conveyed by the conveyance apparatus according to claim 1 .

7. The conveyance apparatus according to claim 1 , wherein at least one of the plurality of third magnets has a curved shape.

8. The conveyance apparatus according to claim 1 , wherein at least two of the plurality of third magnets are arranged in a V-shape.

9. The conveyance apparatus according to claim 1 ,

wherein the movable element further includes, on a side surface, a fourth magnet group including a plurality of fourth magnets arranged along the first direction and magnetized in one direction, and

wherein the stator includes, at a position facing the fourth magnet group, a fifth magnet group including a plurality of fifth magnets magnetized in a direction repelling the fourth magnet group.

10. A conveyance apparatus comprising:

a stator; and

a movable element relatively movable in a predetermined conveyance direction with respect to the stator,

wherein the stator includes a plurality of coils arranged along the predetermined conveyance direction, and a first magnet group including a plurality of first magnets arranged along the predetermined conveyance direction,

wherein the movable element includes:

a second magnet group facing the plurality of coils of the stator and including a plurality of second magnets for moving the movable element in the predetermined conveyance direction by a force generated between the plurality of coils of the stator and the plurality of second magnets of the movable element, and

a third magnet group facing the first magnet group and including a plurality of third magnets generating a force in a direction for relatively levitating the movable element with respect to the stator, and

wherein the second magnet group is arranged on a top surface side of the movable element.

11. The conveyance apparatus according to claim 10 ,

wherein the third magnet group is arranged on a bottom surface side of the movable element, and

wherein the third magnet group generates a force in a direction repelling a direction of a gravitational force between the first magnet group of the stator and the third magnet group.

12. The conveyance apparatus according to claim 10 , wherein a center of the first magnet group in a second direction intersecting with the predetermined conveyance direction and a center of the third magnet group in the second direction are arranged to be shifted from each other in the second direction.

13. The conveyance apparatus according to claim 12 ,

wherein the third magnet group is arranged in each of rows extending in a first direction such that a center of the movable element is positioned therebetween in the second direction, and

wherein the first magnet group is arranged in each of rows extending in the first direction such that the center of the movable element is positioned therebetween in the second direction.

14. The conveyance apparatus according to claim 12 , wherein, by arranging the center of the first magnet group in the second direction intersecting with the predetermined conveyance direction and the center of the third magnet group in the second direction to be shifted from each other in the second direction, a position of the movable element in the second direction is controlled.

15. The conveyance apparatus according to claim 10 , wherein the second magnet group moves the movable element in a direction intersecting with the predetermined conveyance direction, the direction for relatively levitating the movable element, and a direction of a gravitational force, by the force generated between the plurality of coils of the stator and the plurality of second magnets of the movable element.

16. A manufacturing method of an article, the manufacturing method comprising:

manufacturing an article by processing a workpiece conveyed by the conveyance apparatus according to claim 10 .

17. The conveyance apparatus according to claim 10 , wherein the first magnet group and the third magnet group generate respective forces repelling each other therebetween in a direction of a gravitational force.