Method of manufacturing display apparatus

1. A method of manufacturing a display apparatus, the method comprising:

forming a pixel electrode on a substrate;

forming a pixel defining layer covering at least an edge of the pixel electrode and including an opening exposing a part of the pixel electrode;

performing first dry cleaning by adding oxygen gas (O 2 ) to a surface of the pixel electrode exposed by the opening in the pixel defining layer, wherein the oxygen gas (O 2 ) is added at a flow rate in a range of about 1,200 sccm to about 3,600 sccm;

performing second dry cleaning after the first dry cleaning;

forming an intermediate layer on the pixel electrode after the second dry cleaning; and

forming an opposite electrode on the intermediate layer and the pixel defining layer.

2. The method of claim 1 , wherein the first dry cleaning comprises removing organic residue from the surface of the pixel electrode.

3. The method of claim 2 , wherein the organic residue includes the same material as that of the pixel defining layer.

4. The method of claim 1 , further comprising:

forming a planarization layer on the substrate;

forming a contact hole through the planarization layer; and

performing third dry cleaning on the planarization layer and the contact hole.

5. The method of claim 4 , wherein the performing of the first dry cleaning is substantially the same as the performing of the third dry cleaning.

6. The method of claim 1 , further comprising performing a cleaning process between the first dry cleaning and the second dry cleaning.

7. The method of claim 6 , further comprising performing an oven process.

8. The method of claim 1 , wherein the flow rate of the oxygen gas (O 2 ) during the first dry cleaning is greater than a flow rate of oxygen gas (O 2 ) during the second dry cleaning.

9. The method of claim 8 , wherein the second dry cleaning is performed by adding the oxygen gas (O 2 ) at a flow rate of about 20 sccm or less.

10. The method of claim 9 , wherein the second dry cleaning is performed by adding nitrogen gas (N 2 ) at a flow rate in a range of about 200 sccm to about 600 sccm.

11. The method of claim 1 , wherein source power is applied during the first dry cleaning and the second dry cleaning.

12. The method of claim 11 , wherein the source power applied during the first dry cleaning is in a range of about 500 W to about 1,500 W, and

the source power applied during the second dry cleaning is in a range of about 300 W to about 800 W.

13. The method of claim 11 , wherein bias power is applied during the first dry cleaning.

14. The method of claim 13 , wherein the bias power applied during the first dry cleaning is in a range of about 750 W to about 2,250 W.

15. The method of claim 13 , wherein pressure is applied during the first dry cleaning and the second dry cleaning.

16. The method of claim 15 , wherein the pressure applied during the first dry cleaning is in a range of about 5 mTorr to about 35 mTorr, and

the pressure applied during the second dry cleaning is about 5 mTorr or less.

17. The method of claim 15 , wherein a process time of the first dry cleaning is in a range of about 15 seconds to about 45 seconds.

18. The method of claim 17 , wherein a process time of the second dry cleaning is in a range of about 50 seconds to about 80 seconds.

19. The method of claim 1 , wherein a part of the pixel defining layer is removed during the first dry cleaning to increase a width of the opening exposing the part of the pixel electrode.

20. The method of claim 19 , wherein a thickness of the pixel defining layer is reduced by about 1 μm or less.